TLP measurement and analysis of graphene NEMS switches for on-chip ESD protection

Chen, Qi; Li, Cheng; Lu, Fei; Wang, Chenkun; Zhang, Feilong; Wang, Albert; Ng, Jimmy; Xie, Ya‐Hong

doi:10.1109/nems.2017.8017044

Cited by 5 publications

(3 citation statements)

References 12 publications

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“…where E is the Young's modulus, d is the distance of the air gap at zero bias, t is the thickness of graphene, ɛ 0 is the free space electrical permittivity, and L is the length of the ribbon. This device's capability of electrostatic actuation has been demonstrated and confirmed through DC and transmission line pulse testing for electrostatic discharge protection [12][13][14].…”

Section: Introductionmentioning

confidence: 78%

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Comparative study between the fracture stress of poly‐ and single‐crystalline graphene using a novel nanoelectromechanical system structure

Chen

Xie

et al. 2017

Micro & Nano Letters

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Graphene is a two-dimensional carbon material with extraordinary mechanical properties. However, recent studies have found that the presence of grain boundaries significantly decreases fracture stress of graphene, warranting further investigation. This work reports the development of a new method to measure the fracture stress of monolayer graphene with a novel nanoelectromechanical system (NEMS) structure. Suspended graphene ribbon devices with a range of geometries were electrostatically actuated while the graphene sheet was pinned down with various nail structures. By recording the electromechanical responses at fracture and using finite element simulations, the fracture stress was calculated. Using this novel NEMS structure, the fracture stress of polycrystalline graphene grown using conventional chemical vapour deposition (CVD) and single-crystalline graphene grown using local feeding CVD were found to be ∼30 and ∼90 GPa, respectively.

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Section: Introductionmentioning

confidence: 78%

“…This device's capability of electrostatic actuation has been demonstrated and confirmed through DC and transmission line pulse testing for electrostatic discharge protection [12–14].…”

Section: Methodsmentioning

confidence: 99%

Comparative study between the fracture stress of poly‐ and single‐crystalline graphene using a novel nanoelectromechanical system structure

Chen

Xie

et al. 2017

Micro & Nano Letters

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“…We recently devised a new above‐IC graphene‐based nanoelectromechanical system (NEMS) switch structure for on‐chip ESD protection utilising the unique graphene properties [10]. This Letter, an enhance version of a conference brief [11], discusses comprehensive and systematic transient characterisation and statistical analysis of graphene NEMS (gNEMS) ESD switch structures utilising fast transmission line pulse (TLP) measurement for human body model (HBM) ESD protection. The in‐depth analysis of ESD‐critical parameters ( V t1 , R ON and I t2 ) and their relationship to gNEMS device dimensions and TLP pulse shapes (pulse rise time, t r and pulse width, t d ) are reported, offering practical design guidelines.…”

Section: Introductionmentioning

confidence: 99%

Systematic transient characterisation of graphene NEMS switch for ESD protection

Chen

et al. 2017

Micro & Nano Letters

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Integrated circuits (ICs) require robust and low-parasitic on-chip electrostatic discharging (ESD) protection. Compared to conventional in-Si PN-junction-based ESD protection structures, a novel above-IC graphene nanoelectromechanical system (NEMS) switch (gNEMS) ESD protection structure features low parasitic effects and superior current and heat handling capability. This work reports a systematic transient characterisation of gNEMS ESD switches by transmission line pulse (TLP) measurement for human body model ESD protection, revealing transient ESD discharging behaviours related to device dimensions and TLP pulse shapes. It provides practical design guidelines for using gNEMS switch as on-chip ESD protection for ICs. Unlike in-Si ESD protection structures, the new gNEMS ESD switch devices can be made in the back-end-of-line of ICs through three-dimensional heterogeneous integration.

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Graphene-Based on-Chip ESD Protection

Chen

et al. 2019

2019 Electron Devices Technology and Manufacturing Conference (EDTM)

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TLP measurement and analysis of graphene NEMS switches for on-chip ESD protection

Cited by 5 publications

References 12 publications

Comparative study between the fracture stress of poly‐ and single‐crystalline graphene using a novel nanoelectromechanical system structure

Comparative study between the fracture stress of poly‐ and single‐crystalline graphene using a novel nanoelectromechanical system structure

Systematic transient characterisation of graphene NEMS switch for ESD protection

Graphene-Based on-Chip ESD Protection

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