1999
DOI: 10.1016/s0026-2714(99)00136-5
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TIVA and SEI developments for enhanced front and backside interconnection failure analysis

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Cited by 50 publications
(16 citation statements)
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“…The images provide morphological information, such as grain boundaries, grain sizes, and positions of impurities. This method has been used to evaluate the quality of solar cells and semiconducting devices [7][8][9][10].…”
Section: Methodsmentioning
confidence: 99%
“…The images provide morphological information, such as grain boundaries, grain sizes, and positions of impurities. This method has been used to evaluate the quality of solar cells and semiconducting devices [7][8][9][10].…”
Section: Methodsmentioning
confidence: 99%
“…The use of a laser beam to perturb a device-under-test (DUT) while monitoring its behavior was explored and [6], thermallyinduced voltage alternation (TIVA) [7], and opticalbeam-induced resistance change (OBIRCH) [8]. LIVA is based on photoelectric laser stimulation (PLS), whereas TIVA and OBIRCH are based on thermal laser stimulation (TLS).…”
Section: Laser Stimulation Techniquesmentioning
confidence: 99%
“…Other techniques such as Thermally Induced Voltage Alteration (TIVA) were used to identify electrical shorts. The physics of TIVA [5] for integrated circuit (IC) examination employs the constant-current biasing method used in Charge-Induced Voltage Alteration (CIVA) [6] and Light-Induced Voltage Alteration (LIVA) [7]. The constant-current biasing approach provides an extremely sensitive method for detection of subtle changes in the IC or MEMS power demand.…”
Section: Approachmentioning
confidence: 99%