“…TiCl 4 is the most widely used inorganic precursor employed in the CVD of titanium-containing materials (TiN, TiC, TiO 2 , Ti(C,N)) [22]). However, most authors have reported that chlorine is incorporated into the lattice [4,5,7,[9][10][11]13,19,23], rather than to interfaces and no direct evidence has been provided. Therefore, APT is performed on Ti(C,N) and Zr(C,N) coatings to explore if segregation is occurring at GBs and discuss which effect this segregation could have on the mechanical properties of these coatings.…”