Some of the odor-related problems from the semiconductor and opti-electronic industries are caused by the volatile organic compounds, acetic acid, and dimethyl sulfide. These odorous exhausts would persecute residents' health and lower the environmental quality. In this study, Ag-TiO 2 /functional filter was applied to removal these odorous compounds. The results indicated that K 2 CO 3 / activated carbon filter (ACF) would be the better composition of functional filter, which attributed to larger surface area of ACF and mid-alkalinity of K 2 CO 3 . Comparing the TiO 2 type, P25 TiO 2 (Degussa, Germany)/functional filter showed the more superior photodegradation efficiency than ST01 TiO 2 (Ishihra Sangyo, Japan)/functional filter. In addition, Ag-modifying TiO 2 /functional filter enhanced the photocatalysis via postponing the recombination between electrons and holes. The 0.001 M AgNO 3 solution was the optimal immersing concentration to make Ag dispersed uniformly on TiO 2 surface. Operating from 25 to 50°C, the rising temperature was contributive to photodegradation efficiency due to the increase of system reaction energy. Processing photocatalysis below 75 % of relative humidity, existing humidity could be combined with holes to from hydronium (H 3 O ? ) and hydroxyl radical (OH -) to improve photodegradation. Assisted with ozone concentration ratio of 0.7 times, the removal efficiency for high pollutant concentration via Ag-TiO 2 /functional filter could be improved up to 90 % until operating 180 min; this combined method could save the oxidant consumption more than single advanced oxidation method for processing pollutant.