The small-angle x-ray scattering (SAXS) technique was used to investigate inhomogeneities on the scale of 10 to 600 Å in acid-catalyzed titania-silica and zirconia-silica xerogels. SAXS of (TiO 2 ) x (SiO 2 ) 1−x and (ZrO 2 ) x (SiO 2 ) 1−x xerogels with x < 0.1, in which there was no phase separation, showed the presence of two types of inhomogeneity. For Q < 0.05 Å −1 there was a clear departure from Porod scattering which showed that xerogel powder particle surfaces were rough. For 0.1 < Q < 0.4 Å −1 there was a plateau feature corresponding to micropores within the silica-based network, and this feature changes with heat treatment. SAXS of xerogels with x > 0.3 showed the presence of phase-separated regions of metal oxide, which were initially amorphous and crystallized at higher temperatures. A (TiO 2 ) 0.18 (SiO 2 ) 0.82 xerogel that was not initially phase separated became phase separated after heat treatment at 750°C due to reduced solubility of Ti in the silica network.