TiO2-based transparent conducting oxides; the search for optimum electrical conductivity using a combinatorial approach

Abstract

A series of Nb, W, N and F:TiO 2 thin-film systems were grown by a combinatorial atmospheric pressure chemical vapour deposition (APCVD) process. Conditions were varied in each experiment to produce a series of films with compositional gradient. For each system, the electrical resistivity at a number of positions (up to 200 on each film) was screened using a high-throughput tool. This allowed easy identification of the material with the lowest electrical resistivity across a reservoir of combinatorially produced samples. The most conductive material within each system was analysed in depth by X-ray photoelectron spectroscopy, wavelength dispersive X-ray analysis, X-ray diffraction, Raman spectroscopy, scanning electron microscopy, UV-visible-NIR spectroscopy and Hall effect measurements. The most electrically conductive materials are found in the F:TiO 2 [F s z 4-5%, r ¼ 0.21 U cm, m ¼ 3.6 cm 2 V À1 s À1 , n ¼ 8.1 Â 10 18 cm À3 ] and Nb:10 18 cm À3 ] systems. The electrical resistivities reported for Nb:TiO 2 and W:TiO 2 are the best to date for materials grown by APCVD. Extensive comparisons with the literature are made and summarised in this report.

First-principles study of Zr–N crystalline phases: phase stability, electronic and mechanical properties

“…where Fig. 5 shows the directional dependence of Young's moduli for the selected Zr x N y compounds (see eqn (8) in ESI †). For an isotropic system, one would see a spherical shape.…”

“…6 Experimental investigations of nonstoichiometric TM nitrides (TM ¼ Ti, Zr, Hf, V, Nb and Ta) have been conducted intensely for more than thirty years. [7][8][9][10] About twenty ordered carbides and nitrides have been found. 1 However, it has not yet been possible to construct a single phase diagram of TM-C or TM-N systems at low temperatures (most of the available phase diagrams have been constructed above 1300-1500 K).…”

Influencing FTO thin film growth with thin seeding layers: a route to microstructural modification

“…This extremely valuable coincidence of properties means TCO find use in a wide variety of applications including for glazing, flat panel displays and solar panels, usually as electrodes. [11][12][13][14][15][16][17][18] The former includes the control of secondary properties through, for example, film preferred orientation to minimise charge carrier obstacles and tune morphology so as to best suit the optical scattering needs of an application. [2][3][4][5][6][7][8] As technologies continue to advance, demands on the hardware, including TCO components, are increasing.…”

Multifunctional P-Doped TiO2 Films: A New Approach to Self-Cleaning, Transparent Conducting Oxide Materials

“…lower donation efficiency). 17 In all cases, however, a penalty in terms of reduced photocatalytic performance must often be paid. The choice of phosphorous as a dopant allows the possibility of both cationic (P 5+ ) and anionic (P 3-) doping of anatase TiO 2 .…”