TiNi-based thin films in MEMS applications: a review

Fu, Yong Qing; Du, Hejun; Huang, Wei; Zhang, Sam; Hu, Min

doi:10.1016/j.sna.2004.02.019

Cited by 728 publications

(341 citation statements)

References 88 publications

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“…In addition, TiNi thin films show shape memory effects comparable to those of bulk materials 2,3 . TiNi ribbons manufactured by melt-spinning technique have demonstrated to be easily manufactured having control over chemical composition and can be manufactured with less than 20 μm thick.…”

Section: Introductionmentioning

confidence: 91%

Effect of Spun Velocities and Composition on the Microstructure and Transformation Temperatures of TiNi Shape Memory Ribbons

et al. 2016

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Ti-50.13Ni and Ti-49.62Ni (at.%) shape memory alloy ribbons were fabricated by melt-spinning method at different circumferential wheel velocities. The effects of wheel velocity, chemical composition and heat treatments on microstructure and Transformation temperature were investigated. Differences in wheel velocity led to differences in cooling rate and sample dimension, as well as in phase transformation temperatures. Two heat treatment conditions were studied, 350°C for 1h and 350°C for 5h. In the samples produced at high wheel velocity and heat-treated at 350°C for 5h, nanosized Ti-rich precipitates were observed in both chemical compositions. Cross-sectional microstructure was studied by optical microscopy; SEM was used to study the nanometric grains and nano precipitation. The transformation temperatures were analyzed by DSC.

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Section: Introductionmentioning

confidence: 91%

Effect of Spun Velocities and Composition on the Microstructure and Transformation Temperatures of TiNi Shape Memory Ribbons

et al. 2016

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“…Fu [5] reports several devices based on a TiNi film which is actuated when a current is applied to the electrode.…”

Section: Out-of-plane Motion Devicesmentioning

confidence: 99%

University Research Program in Robotics - "Technologies for Micro-Electrical-Mechanical Systems in directed Stockpile Work (DSW) Radiation and Campaigns", Final Technical Annual Report, Project Period 9/1/06 - 8/31/07

Tulenko¹,

Crane²

2007

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The objective for the FY06/07 fiscal year is the development of nano-scale radioisotope powered battery models and supporting radiation testing of components. Task & AccomplishmentsThis task focuses on the concepts of conversion technologies for radioisotope battery designs and the further investigation of radiation resilience levels of candidate materials identified during FY06 and FY07 for fluorescence or 'direct' generation of free current electrons in transducers. Physical testing of key energy conversion parameters were initiated and carried out in order to augment MCNP and the EGS transport code programs and provide the realistic insights to improvements in design of nano-scale radioisotope battery design. In FY07 such advances in design are being computationally pretested via MCNP and EGS and with semi-analytical formulations (when appropriate).The UF development and design team continues the development of a nano-scale radioisotope battery designs and design schemes that have the potential to provide sufficient power for MEMS devices under development in cutting edge laboratories in the US. Studies of fundamental mechanisms and simulation studies of stacked tandem cells optimized for indirect conversion have led to the design concept of using super-1 kilo-eV induced fluorescence of dielectric layers with transparent photovoltaic conversion devices. For all of our materials, fluorescence and phosphorescence overlap in their function. While many standard phosphors typically provide higher conversion ratios, radiation damage from most radioisotopes quickly degrade this initial advantage for power conversion.

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“…Different micro-devices, such as micro-grippers, micromirrors and micro-cages have been designed and demonstrated using TiNi-based SMA thin films (Fu et al [12][13][14][15]. Concerns, however, remain for the applications of thin-film SMA materials, because of their unsatisfactory mechanical and tribological properties, chemical resistance and biological reliability, such as, potential nickel release [16,17] and poor localised corrosion in chloride containing environments [18,19].…”

Section: Introductionmentioning

confidence: 99%

Cyclic Nanoindentation and Nano-Impact Fatigue Mechanisms of Functionally Graded TiN/TiNi Film

Faisal

Prathuru

Goel

et al. 2017

Shap. Mem. Superelasticity

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The mechanisms of nanoscale fatigue of functionally graded TiN/TiNi films have been studied using multiple-loading cycle nanoindentation and nano-impact tests. The functionally graded films were sputter deposited onto silicon substrates, in which the TiNi film provides pseudo-elasticity and shape memory behaviour, while a top TiN surface layer provides tribological and anti-corrosion properties. Nanomechanical tests were performed to investigate the localised film performance and failure modes of the functionally graded film using both Berkovich and conical indenters with loads between 100 lN and 500 mN. The loading history was critical to define film failure modes (i.e. backward depth deviation) and the pseudo-elastic/shape memory effect of the functionally graded layer. The results were sensitive to the applied load, loading mode (e.g. semi-static, dynamic) and probe geometry. Based on indentation force-depth profiles, depth-time data and post-test surface observations of films, it was concluded that the shape of the indenter is critical to induce localised indentation stress and film failure, and generation of pseudo-elasticity at a lower load range. Finite-element simulation of the elastic loading process indicated that the location of subsurface maximum stress near the interface influences the backward depth deviation type of film failure.

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TiNi-based thin films in MEMS applications: a review

Cited by 728 publications

References 88 publications

Effect of Spun Velocities and Composition on the Microstructure and Transformation Temperatures of TiNi Shape Memory Ribbons

Effect of Spun Velocities and Composition on the Microstructure and Transformation Temperatures of TiNi Shape Memory Ribbons

University Research Program in Robotics - "Technologies for Micro-Electrical-Mechanical Systems in directed Stockpile Work (DSW) Radiation and Campaigns", Final Technical Annual Report, Project Period 9/1/06 - 8/31/07

Cyclic Nanoindentation and Nano-Impact Fatigue Mechanisms of Functionally Graded TiN/TiNi Film

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