Tin oxide nanostructure fabrication via sequential infiltration synthesis in block copolymer thin films

A novel atomic layer method for encapsulating individual micro‐ and nano‐particles with thin (sub‐10‐nm) dielectric films is presented. This method leverages the diffusion of vapor‐phase precursors through an underlying inert polymer film to achieve growth of a metal oxide film on all sides of the particle simultaneously, even on the side that is in contact with the substrate. Crucially, the deposition is performed on stationary particles and does not require an agitation mechanism or a special reaction chamber. Here, conformal coatings of alumina are shown to improve stability in aqueous environments for two optically relevant particles: compound semiconductor laser microparticles and lead halide perovskite nanocrystals.

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“…The same concept can be extended to other materials, including SnO x , TiO x , GaO x , InO x , and VaO x . [ 20,24,30,35 ]…”

Section: Figurementioning

confidence: 99%

“…The same concept can be extended to other materials, including SnO x , TiO x , GaO x , InO x , and VaO x . [20,24,30,35] In summary, complete encapsulation of micro-and nanoscale particles by thin alumina films was achieved by VPI using an ALD tool. Crucially, keeping the particles static during the coating process enables us to coat individual particles.…”

mentioning

confidence: 99%

Conformal Coating of Freestanding Particles by Vapor‐Phase Infiltration

Liapis

Subramanian

Cho

et al. 2020

Adv Materials Inter

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“…BCP templates can act as etching masks for oxide layers underneath 150 or as shadow masks or guides for vapor deposition techniques such as PLD [151][152][153] and atomic layer deposition (ALD). 149,[154][155][156][157][158][159] Below, we evaluate two of the most common oxide deposition methods for block copolymer templating: sequential infiltration synthesis (SIS, Sec. III A) and chemical solution deposition (CSD, Sec.…”

Section: Journal Of Applied Physicsmentioning

confidence: 99%

Progress and perspective on polymer templating of multifunctional oxide nanostructures

Berg

Noheda

et al. 2020

Journal of Applied Physics

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Metal oxides are of much interest in a large number of applications, ranging from microelectronics to catalysis, for which reducing the dimensions to the nanoscale is demanded. For many of these applications, the nano-materials need to be arranged in an orderly fashion on a substrate. A typical approach is patterning thin films using lithography, but in the case of functional oxides, this is restricted to sizes down to about 100 nm due to the structural damage caused at the boundaries of the material during processing having a strong impact on the properties. In addition, for applications in which multifunctional or hybrid materials are requested, as in the case of multiferroic composites, standard top-down methods are inadequate. Here, we evaluate different approaches suitable to obtain large areas of ordered nano-sized structures and nanocomposites, with a particular focus on the literature of multiferroic nanocomposites, and we highlight the polymer-templating method as a promising low-cost alternative.

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“…[ 18 ] Favorable interactions between precursors and polar polymer moieties yields selective growth of inorganic materials within the polar blocks of BCP, [ 19 ] enabling fabrication of hybrid organic–inorganic materials and well‐defined inorganic nanostructures templated by BCPs. [ 20 ] Common BCP blocks containing carbonyl [ 21 ] or pyridine moieties [ 18c,22 ] are perfectly suited for such a selective growth by SIS.…”

Section: Introductionmentioning

confidence: 99%

Hybrid Organic–Inorganic–Organic Isoporous Membranes with Tunable Pore Sizes and Functionalities for Molecular Separation

et al. 2021

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Accomplishing on‐demand molecular separation with a high selectivity and good permeability is very desirable for pollutant removal and chemical and pharmaceutical processing. The major challenge for sub‐10 nm filtration of particles and molecules is the fabrication of high‐performance membranes with tunable pore size and designed functionality. Here, a versatile top‐down approach is demonstrated to produce such a membrane using isoporous block copolymer membranes with well‐defined pore sizes combined with growth of metal oxide using sequential infiltration synthesis and atomic layer deposition (SIS and ALD). The pore size of the membranes is tuned by controlled metal oxide growth within and onto the polymer channels, enabling up to twofold pore diameter reduction. Following the growth, the distinct functionalities are readily incorporated along the membrane nanochannels with either hydrophobic, cationic, or anionic groups via straightforward and scalable gas/liquid–solid interface reactions. The hydrophilicity/hydrophobicity of the membrane nanochannel is significantly changed by the introduction of hydrophilic metal oxide and hydrophobic fluorinated groups. The functionalized membranes exhibit a superior selectivity and permeability in separating 1–2 nm organic molecules and fractionating similar‐sized proteins based on size, charge, and hydrophobicity. This demonstrates the great potential of organic–inorganic–organic isoporous membranes for high‐performance molecular separation in numerous applications.

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Tin oxide nanostructure fabrication via sequential infiltration synthesis in block copolymer thin films

Cited by 35 publications

References 68 publications

Conformal Coating of Freestanding Particles by Vapor‐Phase Infiltration

Conformal Coating of Freestanding Particles by Vapor‐Phase Infiltration

Progress and perspective on polymer templating of multifunctional oxide nanostructures

Hybrid Organic–Inorganic–Organic Isoporous Membranes with Tunable Pore Sizes and Functionalities for Molecular Separation

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