Timing of the x-ray preionization of a discharge-pumped ArF excimer laser with different excitation circuits

Feenstra, Louw; Hoekstra, O.B.; Witteman, W.J.; Peters, Peter J.

doi:10.1117/12.334503

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Experimental Set-up and Results Of Measurements1

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2001

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“…2. The electrical circuit operates in the so-called swing mode [27,28]. This means that a fast, highvoltage prepulse of opposite polarity to the PFN voltage is applied to the peaking capacitors at the moment the PFN ca-pacitor C PFN has been fully charged.…”

Section: Experimental Set-up and Results Of Measurementsmentioning

confidence: 99%

Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

Dem'yanov¹,

Feenstra

Peters

et al. 2001

Appl Phys B

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Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spikersustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron-electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron-electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically.

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Section: Experimental Set-up and Results Of Measurementsmentioning

confidence: 99%