Timed Petri nets in modeling and analysis of cluster tools

Zuberek, W.M.

doi:10.1109/70.964658

Cited by 168 publications

(60 citation statements)

References 19 publications

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“…The work presented in this paper models resource competition and interactions between the authorisation module and the execution module. Finally, previous work only models the execution or authorisation of a single workflow [21] [24]. The modelling mechanism developed here however, is able to model the simultaneous execution of multiple workflows.…”

Section: Related Workmentioning

confidence: 99%

Modelling Workflow Executions under Role-Based Authorisation Control

Duan

Chen

et al. 2011

2011 IEEE International Conference on Services Computing

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Section: Related Workmentioning

confidence: 99%

Modelling Workflow Executions under Role-Based Authorisation Control

Duan

Chen

et al. 2011

2011 IEEE International Conference on Services Computing

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“…The computational results of flow patterns (1) and (2) by the heuristic method in the previous section (hereafter called proposed method) and IP are compared. In IP, a general-purpose solver (CPLEX 12.6) was used to solve the mixed-IP models.…”

Section: Comparison Of the Performance Of Ip And The Proposed Methodsmentioning

confidence: 99%

“…The wafer flow is represented by (1, 1, 1, 1). Hereafter, this flow is called flow pattern (2). The Petri net modeling and deadlock prevention policy are applied.…”

Section: Petri Net Modelingmentioning

confidence: 99%

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Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan

Sakai

Nishi

2017

Advances in Mechanical Engineering

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Cluster tools are used for semiconductor wafer fabrication. A cluster tool consists of several loadlock modules, processing modules, and material handling armed robots to transfer wafers between loadlocks and processing modules. Most conventional scheduling methods consider a cyclic schedule to minimize makespan. We consider noncyclic scheduling of dual-armed cluster tools. In practice, it is important to minimize wafer residency time in processing modules to maintain the surface quality of wafers. In the noncyclic operations, the cluster tool causes deadlock which may lead to excessive loss in the wafer fabrication process. We propose an efficient deadlock-free scheduling method for the noncyclic scheduling problem of a dual-armed cluster tool to minimize the residency time and makespan. The proposed method is applied to a dual-armed cluster tool with a non-revisiting process and a revisiting process. Computational results demonstrate the effectiveness of the proposed method.

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“…There are studies on modeling cluster tools using Petri nets [16]- [18]. Khansa et al [19] The dynamic behavior of a p-time Petri net is quoted from [21].…”

Section: B P-time Petri Netsmentioning

confidence: 99%

Scheduling analysis of time-constrained dual-armed cluster tools

Kim

Lee

et al. 2003

IEEE Trans. Semicond. Manufact.

245

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Abstract-Cluster tools, each of which consists of several singlewafer processing chambers and a wafer handling robot, have been increasingly used for diverse wafer fabrication processes. Processes such as some low pressure chemical vapor deposition processes require strict timing control. Unless a wafer processed at a chamber for such a process leaves the chamber within a specified time limit, the wafer is subject to quality problems due to residual gases and heat. We address the scheduling problem for such time-constrained dual-armed cluster tools that have diverse wafer flow patterns. We propose a systematic method of determining the schedulable process time range for which there exists a feasible schedule that satisfies the time constraints. We explain how to select the desirable process times within the schedulable process time range. We present a method of determining the tool operation schedule. For more flexible scheduling under the time constraints, we propose a modification of the conventional swap operation in order to allow wafer delay on a robot arm during a swap operation. We compare the performance of the new swap strategy with that of the conventional swap strategy.

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Timed Petri nets in modeling and analysis of cluster tools

Cited by 168 publications

References 19 publications

Modelling Workflow Executions under Role-Based Authorisation Control

Modelling Workflow Executions under Role-Based Authorisation Control

Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan

Scheduling analysis of time-constrained dual-armed cluster tools

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