Time-Resolving Image Analysis of Drilling of Thin Silicon Substrates with Femtosecond Laser Ablation

Currently, lasers and water jets are used to cut circles in brittle materials such as ceramics. However, a disadvantage of these methods is that the conventional equipment is large and complex. To resolve this issue, a method using the ultrasonic vibration of a hollow-type stepped horn for cutting is developed. We consider that this equipment can be simplified and miniaturized. The shape of the hollow-type stepped horn and the characteristics of the longitudinal vibration required to obtain excellent cutting properties were examined. As a result, the most appropriate depth of the hollow part is one-quarter of the wavelength for a hollow-type stepped horn that vibrates longitudinally. The amplification factor is proportional to the cross-sectional ratio providing the cross-sectional ratio does not exceed 4.6. The characteristics of the longitudinal vibration of the hollow-type stepped horn when the static pressing force at the tip of the horn is varied were also examined. It was clarified that the ultrasonic vibration of a hollow-type stepped horn can be used to cut brittle materials.

Section: Introductionmentioning

confidence: 99%

Longitudinal Vibration Characteristics Required to Cut a Circle by Ultrasonic Vibration

Asami¹,

Miura²

2010

“…1) Currently, wire electric discharge or lasers are used for the hole machining of ceramics. [2][3][4][5][6][7] In addition, the combined use of ultrasonic vibration and polishing slurry has been shown to be an effective method of machining holes in brittle materials such as glass. However, conventional ultrasonic methods use only longitudinal vibration.…”

Section: Introductionmentioning

confidence: 99%

Characteristics of Hole Machining of Brittle Material by Ultrasonic Complex Vibration

Asami¹,

Miura²

2012

A new method using a polishing slurry together with ultrasonic longitudinal and torsional vibrations from a source with a diagonal slit vibration converter is developed for the hole machining of brittle materials. We predict that removal rate and machining accuracy will be improved using ultrasonic longitudinal–torsional vibration when compared with using conventional longitudinal vibration machining. In experiments, soda-lime glass is used as the processing material, and hole roundness error and machining time are measured to assess the hole machining characteristics. We find that machining accuracy is improved using ultrasonic longitudinal–torsional vibration.

“…1) Currently, ultrasonic machining, wire electric discharge, or lasers are used for hole machining of brittle material such as ceramics. [2][3][4][5][6][7] The advantages of wire electric discharge or lasers compared with ultrasonic machining include a higher removal rate and machining accuracy. However, the disadvantages are that conventional equipment is large and its structure is intricate.…”

Section: Introductionmentioning

confidence: 99%

Vibrator Development for Hole Machining by Ultrasonic Longitudinal and Torsional Vibration

Asami

Miura

2011

We are developing a new method using ultrasonic longitudinal and torsional vibrations of a hollow-type stepped horn with diagonal slits for hole machining. We foresee that, with this method, equipment can be simplified and miniaturized. In this study, ultrasonic vibration sources of a horn with diagonal slits and a uniform rod with diagonal slits are used. The longitudinal and torsional vibration characteristics of the horn are studied and the shape of the diagonal slits is examined. As a result, to obtain the maximum torsional vibration at the tip, the diagonal slit conditions were as follows: the center position of the diagonal slits was the position of the node of longitudinal vibration, the angle was 35°, and the depth was 3.5 mm in all cases of cross-sectional ratio. It was clarified that a horn with diagonal slits can be used for hole machining of brittle materials.