Thermal transport properties of multilayer thin films both normal and parallel to the layers have been measured. Al/Ti multilayer films 3 µm thick, with individual layers systematically varied from 2.5 nm to 40 nm, were studied on Si substrates. Layers of Al and Ti were nominally equal in thickness, with actual composition determined for each specimen using energy dispersive spectroscopy. The thermal diffusivity both in the plane and normal to the plane of the films (thermal conductivity divided by specific heat per volume) was found to decrease significantly with decreasing bilayer thickness. Pure Ti and Al films as well as Cu films from 0.1 to 5 µm thick were also studied. In plane electrical conductances of the Al/Ti multilayers were also measured.
INTRODUCTIONIt is generally recognized that thermal transport properties of thin films can be less than half those of bulk materials [1,2,3,4]. This decrease can arise from modifications within the bulk of the films (i.e., high defect density or low mass density) or an interface thermal resistance. A comprehensive examination of the latter effect can be found in review articles by Swartz and Pohl [5] and Cahill [6]. Some researchers have measured the interface resistance by studying the thermal transport properties of metal/metal [7,8], metal/oxide [9], oxide/oxide [10] or semiconductor/semiconductor [11,12,13,14,15,16] multilayer films. Unlike techniques using single layer films, experiments using multilayers can separate interface effects from those due to total film thickness, e.g. systematic measurement errors. Discussion and analysis of experimental data utilizing models of the scattering at the interfaces exist in the literature [17,18,19].To our knowledge, this work is the first time that anisotropic thermal transport properties of multilayer thin films have been measured using the Mirage technique; the only other published measurement of anisotropic properties was accomplished using ac-calorimetry [15]. By studying films with a range of bilayer thickness, it has been possible to systematically examine the effect of the interfaces on the anisotropic thermal diffusivity. Most of the cited studies used techniques that restricted their measurements to in-plane thermal diffusivities, though a few used transient reflection [8,16] or transmission techniques [7,9], or simplified mirage [12] that were limited to studying the diffusivity normal to the film surface. The Mirage technique utilized here is capable of measuring the thermal diffusivity at room temperature in both the normal and in-plane directions.The theory for the Mirage technique measurements used here has been outlined in several publications [20,21,22], including a later correction [23] of the theory required due to errors in the earlier analyses. In this technique, a focused heating laser aligned normal to the specimen surface is used to heat a spot on the surface of the specimen (see Fig. 1). Temporal modulation of the laser intensity results in oscillatory temperature distributions both in ...