Time-resolved plasma diagnostic by laser-diode spectroscopy

Beverini, N.; Gobbo, Giulia; Genovesi, G.L.; Maccarrone, Francesco; Strumia, F.; Paganucci, Fabrizio; Turco, A.; Andrenucci, Mariano

doi:10.1109/3.541673

Cited by 12 publications

(9 citation statements)

References 10 publications

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“…As previously indicated, the properties of argon ions are of importance in atmospheric and astrophysical plasmas and are widely used in laboratory plasmas as diagnostic impurities [23,24]. Properties of argon ions also find many applications in plasma etching and lasers [25].…”

Section: Introductionmentioning

confidence: 98%

Valence-shell photoionization of chlorinelike Ar+ions

et al. 2011

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Absolute cross-section measurements for valence-shell photoionization of Ar + ions are reported for photon energies ranging from 27.4 to 60.0 eV. The data, taken by merging beams of ions and synchrotron radiation at a photon energy resolution of 10 meV, indicate that the primary ion beam was a statistically weighted mixture of the 2 P o 3/2 ground state and the 2 P o 1/2 metastable state of Ar + . Photoionization of this Cl-like ion is characterized by multiple Rydberg series of autoionizing resonances superimposed on a direct photoionization continuum. Observed resonance line shapes indicate interference between indirect and direct photoionization channels. Resonance features are spectroscopically assigned and their energies and quantum defects are tabulated. The measurements are satisfactorily reproduced by theoretical calculations based on an intermediate coupling semirelativistic Breit-Pauli approximation.

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Section: Introductionmentioning

confidence: 98%

Valence-shell photoionization of chlorinelike Ar+ions

et al. 2011

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“…Recently, tunable lasers have been used in absorption and induced fluorescence experiments for electron density diagnostics, see e.g. [34,35,36,37]. In a typical experiment the continuously frequency-scanning laser beam is directed through the plasma and by monitoring either intensity of transmitted radiation, or by recording induced fluorescence intensity, it is possible to determine the plasma line shape and, in conjunction with the wavelength reference source, the line shift.…”

Section: Methodsmentioning

confidence: 99%

On the use of non-hydrogenic spectral line profiles for plasma electron density diagnostics

Konjević¹

2001

Plasma Sources Sci. Technol.

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Recent experimental studies of plasma broadening and shifting of non-hydrogenic neutral atom and positive ion spectral lines are reviewed with emphasis on the application for diagnostics of plasma electron density. The comparison between theory and experiments is discussed and a set of data for plasma diagnostic purposes is proposed. Advancements in experimental techniques and procedures are also discussed.

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“…Diode lasers have been actively used for measuring densities of metastable and emitting excited states of neutral or ionic species of argon, krypton and xenon. [54][55][56][57][58][59][60] In addition, they have been successfully used for determination of the gas kinetic (translational) temperature in the rare gas plasmas. 52,[55][56][57][58][59][60][61] Concentrations of excited atoms of chlorine, fluorine and oxygen have also been measured with diode lasers.…”

Section: Measurements Of Excited and Metastable Atom Densities And Te...mentioning

confidence: 99%

“…[54][55][56][57][58][59][60] In addition, they have been successfully used for determination of the gas kinetic (translational) temperature in the rare gas plasmas. 52,[55][56][57][58][59][60][61] Concentrations of excited atoms of chlorine, fluorine and oxygen have also been measured with diode lasers. 62,63 Most of previous work with the diode lasers was performed using telecommunication lasers that emit a single spectral mode (no broader than 10 -4 nm) formed in the Fabry-Pérot cavity defined by the laser edge facets.…”

Section: Measurements Of Excited and Metastable Atom Densities And Te...mentioning

confidence: 99%

Sensor for monitoring plasma parameters

2004

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A spectrally tunable VCSEL (vertical cavity surface-emitting laser) was used as part of sensing hardware for measurements of the radial-integrated gas temperature inside an inductively coupled plasma reactor. The data were obtained by profiling the Doppler-broadened absorption of metastable Ar atoms at 763.51 nm in argon and argon/nitrogen plasmas (3, 45, and 90% N2 in Ar) at pressure 0.5-70 Pa and inductive power of 100 and 300 W. The results were compared to rotational temperature derived from the N2 emission at the (0,0) transition of the C - B system. The differences in integrated rotational and Doppler temperatures were attributed to non-uniform spatial distributions of both temperature and thermometric species (Ar* and N2*) that varied depending on conditions. A two-dimensional, two-temperature fluid plasma simulation was employed to explain these differences. This work should facilitate further development of a miniature sensor for non-intrusive acquisition of data (temperature and densities of multiple plasma species) during micro- and nano-fabrication plasma processing, thus enabling the diagnostic-assisted continuous optimization and advanced control over the processes. Such sensors would also enable tracking the origins and pathways of damaging contaminants, thereby providing real-time feedback for adjustment of processes. Our work serves as an example of how two line-of-sight integrated temperatures derived from different thermometric species make it possible to characterize the radial non-uniformity of the plasma.Comment: Presented at the Photonics West conference, Lasers and Applications in Science and Technology, San Jose, CA, January 2004. This version gives a more detailed introduction on diode lasers as diagnostic tool for micro/nano-fabrication. A follow-up paper published in Plasma Sources Sci. Technol., v.13, 691-700 (2004) featured improvements in plasma simulatio

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Time-resolved plasma diagnostic by laser-diode spectroscopy

Cited by 12 publications

References 10 publications

Valence-shell photoionization of chlorinelike Ar+ions

Valence-shell photoionization of chlorinelike Ar+ions

On the use of non-hydrogenic spectral line profiles for plasma electron density diagnostics

Sensor for monitoring plasma parameters

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