Time-resolved <i>operando</i> analysis of the pyrolysis of a PECVD-deposited siloxane polymer using a combined DRIFTS–MS system

Nguyen, Bryan; Tabarkhoon, Farnaz; Zhao, Linghao; Mishra, Ankit; Gupta, Malancha; Vashishta, Priya; Tsotsis, Theodore T.

doi:10.1039/d3me00032j

Mol. Syst. Des. Eng.

2023

DOI: 10.1039/d3me00032j

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Time-resolved operando analysis of the pyrolysis of a PECVD-deposited siloxane polymer using a combined DRIFTS–MS system

Bryan Nguyen

Farnaz Tabarkhoon

Linghao Zhao

et al.

Abstract: Experimental and computational study of the mechanism of conversion, via pyrolysis, of pV4D4 films into silica ceramics and of the impact of preparation conditions on their final structure.

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Time-resolved operando analysis of the pyrolysis of a PECVD-deposited siloxane polymer using a combined DRIFTS–MS system

Abstract: Experimental and computational study of the mechanism of conversion, via pyrolysis, of pV4D4 films into silica ceramics and of the impact of preparation conditions on their final structure.

Cited by 0 publications

References 57 publications

No citations

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