Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

Zauner, L.; Bahr, A.; Kozák, Tomáš; Čapek, Jiří; Wójcik, Tomasz; Hunold, O.; Kolozsvári, S.; Zeman, Petr; Mayrhofer, P.H.; Riedl, H.

doi:10.1016/j.surfcoat.2021.127638

Cited by 6 publications

(1 citation statement)

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“…ESAs use radial or spherical electric fields to bend and partially focus ion beams. The cylindrical deflector plate analysers, introduced by Hughes and Rojansky in 1929 , and commonly used, ,− focus the ion beam only in the dispersion direction. Matsuda in 1961 proposed adding two additional electrodes to achieve ion beam focusing in both directions.…”

Section: Introductionmentioning

confidence: 99%

Energy-Resolving Time-of-Flight Mass Spectrometry for Bulk Plasma Analysis

Watzek,

Sturm,

Stoermer

et al. 2024

J. Am. Soc. Mass Spectrom.

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This work presents a newly designed energy-resolving time-of-flight mass spectrometer (E-TOFMS) for analysing the energy and mass of ions in bulk plasma. The system comprises an electrostatic sector analyser (ESA) for energy-to-charge (E/Q) ratio resolution and an orthogonal reflectron TOFMS for mass-to-charge (m/Q) ratio analysis. The design choices are explained, providing insight into electron and ion path simulations. The instrument was characterised using various ion generation sources, including an electron impact ion source, high power impulse magnetron sputtering, and microwave plasma electron cyclotron resonance sources. To validate its functionality, the energy-resolving data was compared with data obtained under the same conditions using a Langmuir probe and a retarding field energy analyser (RFEA). The benefits of the proposed E-TOFMS were demonstrated by sputtering highly alloyed steel with multiple isotope-rich elements, such as Mo or W. This technique offers an E/Q ratio resolution of up to 0.15 V for a range up to 125 V and a m/Q ratio resolution of at least 700 Th for a range up to 250 Th, with a temporal resolution of 10 μs.

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