2017
DOI: 10.1002/elps.201700268
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Tilted pillar array fabrication by the combination of proton beam writing and soft lithography for microfluidic cell capture Part 2: Image sequence analysis based evaluation and biological application

Abstract: Abstractwww.electrophoresis-journal.com Page 2 ElectrophoresisThis article is protected by copyright. All rights reserved.

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“…In particular, it has received attention for the in situ characterization of cells after trapping them using microfluidic device equipped with microwell arrays [18,19]. There are traditional methods for fabricating microfluidic devices such as soft lithography, photolithography, and laser direct writing [20,21,22]. Although photolithography has the advantages of high resolution, a physical mask is essential during the fabrication process, and this technique requires extreme environmental conditions.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, it has received attention for the in situ characterization of cells after trapping them using microfluidic device equipped with microwell arrays [18,19]. There are traditional methods for fabricating microfluidic devices such as soft lithography, photolithography, and laser direct writing [20,21,22]. Although photolithography has the advantages of high resolution, a physical mask is essential during the fabrication process, and this technique requires extreme environmental conditions.…”
Section: Introductionmentioning
confidence: 99%