Tilted magnetic micropillars enabled dual-mode sensor for tactile/touchless perceptions

Zhou, Qian; Ji, Bing; Hu, Bin; Li, Shunbo; Xu, Yuheng; Gao, Yibo; Wen, Weijia; Zhou, Jun; Zhou, Boyu

doi:10.1016/j.nanoen.2020.105382

Cited by 61 publications

(54 citation statements)

References 43 publications

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“…[16,17] To improve the sensitivity, great efforts have been paid to develop micro-structured dielectrics with higher deformation capability, including micro-domes, micro-pillars, micro-pyramids, microcilia, porous structures or even hierarchical structures, etc. [18][19][20][21][22][23][24] These microstructures, however, mainly take effect under low pressure scopes, which results in the restricted linearity range and the dramatically decreased sensitivity and pressure resolution in high-pressure region. Improving the intrinsic dielectric property of the micro-structured dielectrics has been proved as an effective way to enhance the attenuated sensitivity under high pressure scopes.…”

Section: Doi: 101002/smll202103312mentioning

confidence: 99%

Gradient Architecture‐Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range

Zhou

Lei

et al. 2021

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102

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The sensitivity and linearity are critical parameters that can preserve the high pressure‐resolution across a wide range and simplify the signal processing process of flexible tactile sensors. Although extensive micro‐structured dielectrics have been explored to improve the sensitivity of capacitive sensors, the attenuation of sensitivity with increasing pressure is yet to be fully resolved. Herein, a novel dielectric layer based on the gradient micro‐dome architecture (GDA) is presented to simultaneously realize the high sensitivity and ultrabroad linearity range of capacitive sensors. The gradient micro‐dome pixels with rationally collocated amount and height can effectively regulate the contact area and hence enable the linear variation in effective dielectric constant of the GDA dielectric layer under varying pressures. With systematical optimization, the sensor exhibits the high sensitivity of 0.065 kPa−1 in an ultrabroad linearity range up to 1700 kPa, which is first reported. Based on the excellent sensitivity and linearity, the high pressure‐resolution can be preserved across the full scale of pressure spectrum. Therefore, potential applications such as all‐round physiological signal detection in diverse scenarios, control instruction transmission with combinatorial force inputs, and convenient Morse code communication with non‐overlapping capacitance signals are successfully demonstrated through a single sensor device.

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Section: Doi: 101002/smll202103312mentioning

confidence: 99%

Gradient Architecture‐Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range

Zhou

Lei

et al. 2021

Small

Self Cite

102

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“…and multi‐layer structures have been extensively studied. [ 15,19–22 ] Such microstructures, however, mainly take effect in low‐pressure region, thus leading to the narrow linearity range and dramatically reduced pressure resolution with increasing pressures. Although increasing the dielectric constant of the micro‐structured dielectric with high‐permittivity particles (e.g., CaCu 3 Ti 4 O 12 , BaTiO 3 , etc.)…”

Section: Introductionmentioning

confidence: 99%

Bio‐Inspired Hybrid Dielectric for Capacitive and Triboelectric Tactile Sensors with High Sensitivity and Ultrawide Linearity Range

Zhou

et al. 2021

Advanced Materials

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143

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The trade‐off between sensitivity and linearity is critical for preserving the high pressure‐resolution over a broad range and simplifying the signal processing/conversion of flexible tactile sensors. Conventional dielectrics suffer from the difficulty of quantitatively controlling the interacted mechanical and dielectric properties, thus causing the restricted sensitivity and linearity of capacitive sensors. Herein, inspired by human skin, a novel hybrid dielectric composed of a low‐permittivity (low‐k) micro‐cilia array, a high‐permittivity (high‐k) rough surface, and micro‐dome array is developed. The pressure‐induced series‐parallel conversion between the low‐k and high‐k components of the hybrid dielectric enables the linear effective dielectric constant and controllable initial/resultant capacitance. The gradient compressibility of the hybrid dielectric enables the linear behavior of elastic modulus with pressures, which derives the capacitance variation determined by the effective dielectric constant. Therefore, an ultrawide linearity range up to 1000 kPa and a high sensitivity of 0.314 kPa–1 are simultaneously achieved by the optimized hybrid dielectric. The design is also applicable for triboelectric tactile sensors, which realizes the similar linear behavior of output voltage and enhanced sensitivity. With the high pressure‐resolution across a broad range, potential applications such as healthcare monitoring in diverse scenarios and control command conversion via a single sensor are demonstrated.

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“…Nevertheless, some kinds of tilt sensors, whose elements were successfully fabricated in micro-or nano-scale have already been reported. Their structure is completely different from the designs presented in this review: e.g., micropillars reported in [64], or nano-iron suspension discussed in [65]. It is highly probable that in the future, new types of microand nano-sensors similar to those presented in this review will appear.…”

Section: Prospective Future Developmentmentioning

confidence: 80%

Electric-Contact Tilt Sensors: A Review

Łuczak

Ekwińska

2021

Sensors

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A review of various kinds of solid tilts sensors, using a free mechanical member for generation of electric-contact (mostly a ball), is presented. Standard and original solutions are discussed. The latest patents are described. A classification of the existing solutions with respect to their sensing principle is proposed. Possible types of the electric/electronic circuits are discussed. Advantages of these sensors are emphasized: mainly optional operation without power supply, resistance to electrostatic discharges, and simplicity of signal processing. Technological details are briefly introduced, along with miniaturization prospects. Additionally, liquid tilt sensors are succinctly characterized. The most typical tilt sensing techniques are concisely compared.

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Tilted magnetic micropillars enabled dual-mode sensor for tactile/touchless perceptions

Cited by 61 publications

References 43 publications

Gradient Architecture‐Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range

Gradient Architecture‐Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range

Bio‐Inspired Hybrid Dielectric for Capacitive and Triboelectric Tactile Sensors with High Sensitivity and Ultrawide Linearity Range

Electric-Contact Tilt Sensors: A Review

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