2023
DOI: 10.1021/acsami.2c17351
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Tiling the Silicon for Added Functionality: PLD Growth of Highly Crystalline STO and PZT on Graphene Oxide-Buffered Silicon Surface

Abstract: The application of two-dimensional (2D) materials has alleviated a number of challenges of traditional epitaxy and pushed forward the integration of dissimilar materials. Besides acting as a seed layer for van der Waals epitaxy, the 2D materials� being atom(s) thick�have also enabled wetting transparency in which the potential field of the substrate, although partially screened, is still capable of imposing epitaxial overgrowth. One of the crucial steps in this technology is the preservation of the quality of … Show more

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Cited by 3 publications
(10 citation statements)
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“…First, it promoted the growth of a single crystalline STO layer since there is a negligible amount of dangling bonds present on the surface of rGO and accordingly the depositing STO material can more easily retain its own crystal structure. Second, rGO effectively mitigated the intermixing reaction between the STO and the Si which was observed in the STO/Si sample, and the deposited STO can grow in the preferred orientation in line with the underlying Si substrate. , Therefore, the degree of epitaxy was significantly improved compared to the case without rGO. Moreover, no other orientations except (00l) were detected, indicating the high quality of the STO film.…”
Section: Resultsmentioning
confidence: 99%
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“…First, it promoted the growth of a single crystalline STO layer since there is a negligible amount of dangling bonds present on the surface of rGO and accordingly the depositing STO material can more easily retain its own crystal structure. Second, rGO effectively mitigated the intermixing reaction between the STO and the Si which was observed in the STO/Si sample, and the deposited STO can grow in the preferred orientation in line with the underlying Si substrate. , Therefore, the degree of epitaxy was significantly improved compared to the case without rGO. Moreover, no other orientations except (00l) were detected, indicating the high quality of the STO film.…”
Section: Resultsmentioning
confidence: 99%
“…Afterward, GO nanosheets obtained by centrifugation at 1000 rpm and redispersion from the as-received suspension (4 mg mL –1 , Advanced Graphene Products, Poland) to remove agglomerated large particles, were deposited on the surface of piranha-treated Si using a spin-coating technique. The spinning speed was kept at 8000 rpm throughout the coating process while the GO suspension was applied in a dropwise fashion with the duration between each droplet (∼5 μL) of 30 s. 40 μL is required for full coverage of GO on the surface of the Si substrate . Following the spin-coating, the GO-Si sample was glued on the resistive heater by silver paste (Ted Pella, Inc.) and transferred to the UHV PLD chamber (Demcon Twente Solid State Technology, The Netherlands).…”
Section: Methodsmentioning
confidence: 99%
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“…[14,15] Crystalline thin films have also been successfully integrated with Si via the use of a 2D material, such as graphene as a buffer layer. [15][16][17][18] Graphene serves as a diffusion barrier, preventing the interfacial reactions at the high temperatures required for crystallization. [18] Owing to the 2D character of the template and the 3D character of the thin film material, quasi van der Waals (vdW) type of growth is realized.…”
Section: Introductionmentioning
confidence: 99%