Tie和角谱迭代用于光学元件表面划痕深度检测

Abstract

Objective At present, optical elements are almost always employed in the utilization and development of a wide variety of optical instruments. Due to improper handling during processing, scratches can appear on the surface of optical elements. Scattered light from surface scratches can reduce the beam quality, increase system noise, and reduce contrast, thereby affecting the performance and normal operation of the entire optical system . Therefore, the detection of surface