“…Some of these devices are fabricated on hard substrates, while the other devices are fabricated on flexible substrates. The hard substrate materials for TMS applications include silicon, [ 1,2,5,53,67,80,83,117,147,148,151 ] gallium arsenide, [ 59,133,134,158 ] glass, [ 111,146 ] SiO 2 , [ 21,54,96–99,102,103,150 ] quartz, [ 55,90,131,140 ] AlN, [ 164 ] SiN x , [ 64 ] and sapphire. [ 144 ] They are usually characterized by the high permittivity and high resistance (such as those of silicon and gallium arsenide).…”