Through-focus or volumetric type of optical imaging methods: a review

Attota, Ravikiran

doi:10.1117/1.jbo.23.7.070901

Cited by 18 publications

(7 citation statements)

References 107 publications

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“…Through-focus scanning optical microscopy (TSOM), first introduced by Attota et al in 2008, has been proven accurate and high-throughput to characterize fabricated nanostructures. − Unlike conventional optical microscopy, which seeks to produce focused images with the sharpest contrast, TSOM captures a series of through-focus images with the focal plane sweeping through the sample object. These defocused images describe the evolution of light in the vicinity of the object, which is associated with the k -space distribution of the scattering light and, as predicted by the Mie theory, is sensitive to the object size.…”

Section: Introductionmentioning

confidence: 99%

Machine Learning Enhanced Optical Microscopy for the Rapid Morphology Characterization of Silver Nanoparticles

et al. 2023

ACS Appl. Mater. Interfaces

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The rapid characterization of nanoparticles for morphological information such as size and shape is essential for material synthesis as they are the determining factors for the optical, mechanical, and chemical properties and related applications. In this paper, we report a computational imaging platform to characterize nanoparticle size and morphology under conventional optical microscopy. We established a machine learning model based on a series of images acquired by through-focus scanning optical microscopy (TSOM) on a conventional optical microscope. This model predicts the size of silver nanocubes with an estimation error below 5% on individual particles. At the ensemble level, the estimation error is 1.6% for the averaged size and 0.4 nm for the standard deviation. The method can also identify the tip morphology of silver nanowires from the mix of sharp-tip and blunt-tip samples at an accuracy of 82%. Furthermore, we demonstrated online monitoring for the evolution of the size distribution of nanoparticles during synthesis. This method can be potentially extended to more complicated nanomaterials such as anisotropic and dielectric nanoparticles.

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Section: Introductionmentioning

confidence: 99%

Machine Learning Enhanced Optical Microscopy for the Rapid Morphology Characterization of Silver Nanoparticles

et al. 2023

ACS Appl. Mater. Interfaces

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“…The defocusing configuration is key to TSOM. Theoretically, there are at least 15 approaches to defocusing, and these approaches can be summarised into two major categories: extracting images directly or computationally (Attota, ). Most of the current literatures are on stage scanning methods (Attota et al ., ; Attota & Dixson, ; Attota et al ., ,b).…”

Section: Introductionmentioning

confidence: 99%

Multiple parametric nanoscale measurements with high sensitivity based on through‐focus scanning optical microscopy

Peng

Hao

Pan

et al. 2019

Journal of Microscopy

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Summary High‐throughput through‐focus scanning optical microscopy (TSOM) involves defocusing along the optical axis and capturing a series of defocus images and is useful in optical nanoscale measurement. However, TSOM is usually affected by its optical and mechanical noises. In this study, the issue of sensitivity and application in three‐dimensional (3D) multiple parameter measurement of TSOM is investigated. First, a TSOM system with objective scanning and its relative simulation algorithm are proposed. Second, based upon the system and algorithm, an experiment on an isolated Au line is performed and the corresponding matching library is established. Comparing the experimental TSOM image and simulated TSOM images of the library, 3D multiple parameter results of the Au line are extracted. Third, the precision of the system is analysed through a fidelity test particular for through‐focus images. According to this study, the system is robust to the optical and mechanical noises and hence could be useful in 3D multiple parametric measurement and high‐volume nanomanufacturing.

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“…Through-focus (TF) optical imaging is steadily gaining momentum in several areas such as biological imaging, optical metrology, microscopy, adaptive optics, material processing, optical data storage, and optical inspection [1–14]. In the present context, TF imaging includes extended-depth-of-field, blurred, defocused, three-dimensional (3D), extended-focused, outof-focus, axial scanning, and volumetric imaging.…”

Section: Introductionmentioning

confidence: 99%

“…A review of the literature reveals several types of optical methods to collect TF images [1, 5, 7, 13, 14, 29, 32–41]. Because of this, certain variations in the TF image quality can be expected depending on the TF imaging method.…”

Section: Introductionmentioning

confidence: 99%

Fidelity test for through-focus or volumetric type of optical imaging methods

Attota¹

2018

Opt. Express

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Rapid increase in interest and applications of through-focus (TF) or volumetric type of optical imaging in biology and other areas has resulted in the development of several TF image collection methods. Achieving quantitative results from images requires standardization and optimization of image acquisition protocols. Several standardization protocols are available for conventional optical microscopy where a best-focus image is used, but to date, rigorous testing protocols do not exist for TF optical imaging. In this paper, we present a method to determine the fidelity of the TF optical data using the TF scanning optical microscopy images.

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Through-focus or volumetric type of optical imaging methods: a review

Cited by 18 publications

References 107 publications

Machine Learning Enhanced Optical Microscopy for the Rapid Morphology Characterization of Silver Nanoparticles

Machine Learning Enhanced Optical Microscopy for the Rapid Morphology Characterization of Silver Nanoparticles

Multiple parametric nanoscale measurements with high sensitivity based on through‐focus scanning optical microscopy

Fidelity test for through-focus or volumetric type of optical imaging methods

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