Three-Dimensional Surface Stereometric Analysis of Ni–Cu Films with Different Cu Contents
Vali Dalouji,
Samira Goudarzi
Abstract:The purpose of this work is a stereometric analysis of Ni−Cu thin films to obtain the three-dimensional (3D) microtexture surface based on atomic force microscopy (AFM). Four Ni−Cu thin films on glass and silicon substrates were prepared by a capacitively coupled RF-PECVD system with a 13.56 MHz power supply. The AFM data of the samples were stereometrically analyzed, and the surface microtexture was determined according to the definition of relevant parameters in the standards ISO 25178−2:2012 and ASME B46.1−… Show more
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