Three-dimensional simulation of focused ion beam processing using the level set method

Ertl, Otmar; Filipovic, Lado; Selberherr, S.

doi:10.1109/sispad.2010.5604573

Cited by 4 publications

(2 citation statements)

References 16 publications

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“…It was observed that for all doses below 10 16 ions/cm 2 , surface swelling occurred. The surface swelling is believed to occur in order to relieve strain caused by implanted Ga ions [8] as well as sub surface damage [20]. By increasing the current at corresponding doses a reduction in surface swelling, which could be the indicative of greater removal of substrate material, was also observed (Fig.…”

Section: Resultsmentioning

confidence: 93%

Effects of current on early stages of focused ion beam nano-machining

Sabouri¹,

Anthony²,

Prewett³

et al. 2015

Mater. Res. Express

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In this report we investigate the effects of focused ion beam (FIB) machining at low doses in the range of 10 15 ions/cm 2 to 10 16 ions/cm 2 for currents below 300 pA on Si(100) substrates. The effects of similar doses with currents in the range 10pA to 300 pA were compared. The topography of resulting structures has been characterized using atomic force microscope, while crystallinity of the Si was assessed by means of Raman spectroscopy. These machining parameters allow a controllable preparation of structures either protruding from, or recessed into, the surface with nanometre precision.2

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Section: Resultsmentioning

confidence: 93%

Effects of current on early stages of focused ion beam nano-machining

Sabouri¹,

Anthony²,

Prewett³

et al. 2015

Mater. Res. Express

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“…Since a focused ion beam diameter is commensurable to the projected ion range, its ERF must be calculated in two-dimensional geometry. To describe ion flux density along the radius of CFIB the way from [12] is used:…”

Section: Mathematical Formulation Of Energy Release Functionmentioning

confidence: 99%

Calculation of Energy Release Function of Ion Beam in Solids

Ryabkina

Stepanova

2014

AMR

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The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. High-power pulsed ion beam and continuous focused ion beam interaction with metals are considered. The power density of deposited energy and specific energy input in a target have been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated.

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