Abstract:voltage, current and phase shlft. From these measurements the series equivalent discnarae resistance, Rd, has been caizulated. T%eu~--, shows that Rd can be dilideC irito t r v o I?' components, the plasma body r -e s i s t a n c e , R and the sheath rzsistance, R, (corresponding to ion acceleration), where H-=Vp/I ( V p is the plasma body voltage) and 5; and R S are fairly constant over a wide range o f I. two components: the power dissicated in the plasma body and the power dissipated in accelerating ions… Show more
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