Three Dimensional Nanofabrication Using Surface Forces

Abstract

We describe strategies to curve, rotate, align and bond precisely patterned two dimensional (2D) nanoscale panels using forces derived from a minimization of surface area of liquefying or coalescing metallic grains. We demonstrate the utility of this approach by discussing variations in template size, patterns and material composition. The strategy provides a solution path to overcome the limitation of inherently two dimensional lithographic processes by transforming 2D templates into mechanically robust and precisely patterned nanoscale curved structures and polyhedra with considerable versatility in material composition.

Magnetic Micro-Origami

“…Gagler [21] and Gracias et al [23][24][25][26][27][28][29][30][31] showed that the surface tension of evaporating drop of liquid is sufficient to pull the walls of the photolithographically defined thin film patterns together and form various figures, such as boxes or pyramids with the size of several micrometers. These patterns typically consist of more rigid areas connected by thinner areas, which serve as hinges, when the thicker walls fold.…”

“…In addition to self-assembly of structures attached to the substrate, micro-origami figures disconnected from the substrate can serve as building blocks for meta-materials, where magnetic elements of the figures or surface tension at hydrophilic parts can be used to put these blocks together in two-or three-dimensional networks [26]. Here, tessellation methods of origami patterns can be used.…”

Self-Assembly in Micro- and Nanofluidic Devices: A Review of Recent Efforts

“…The self-assembly of three dimensional objects on the micro-and nanoscale with any desired patterns based on surface force has been successfully demonstrated [77,78] and is potentially useful if coupled with micro-and nanofluidic applications. Ye et al has successfully combined microfabricated nanoliter scale fluidic devices with wireless technology by fabricating remote-controlled cubic microcontainers for temporal and spatial chemical delivery [37].…”

“…Ye et al has successfully combined microfabricated nanoliter scale fluidic devices with wireless technology by fabricating remote-controlled cubic microcontainers for temporal and spatial chemical delivery [37]. The gold-coated, nickel nanoliter containers were fabricated based on a combination of conventional microfabrication and self-assembly [77,78]. To facilitate chemical delivery, the containers were filled with a gel that was soaked in the chemical reagent to be released.…”

Origami Inspired Self-assembly of Patterned and Reconfigurable Particles

“…We leverage the advantages of planar lithography and combine them with self-folding methods 1-20 wherein physical forces derived from surface tension or residual stress, are used to curve or fold planar structures into three dimensional (3D) structures. In doing so, we make it possible to mass produce precisely patterned static and reconfigurable particles that are challenging to synthesize.In this paper, we detail visualized experimental protocols to create patterned particles, notably, (a) permanently bonded, hollow, polyhedra that self-assemble and self-seal due to the minimization of surface energy of liquefied hinges [21][22][23] and (b) grippers that self-fold due to residual stress powered hinges 24,25 . The specific protocol described can be used to create particles with overall sizes ranging from the micrometer to the centimeter length scales.…”