In this work, the dynamical analysis of carrier transportation in a typical piezoelectric device working in ballistic regime is conducted. Based on the quantum scatting theory, the Poisson and Schrodinger equations are combined for calculating the dynamical transmission coefficient of the a metalpiezoelectric ZnO-metal structure subject to sinusoidal and rectangular external stresses. The roles played by the spanning width of induced piezopotential and incident electron energy in affecting transmission probability are further discussed and clarified, respectively. The cut-off frequency of the piezoelectric device is also studied. Moreover, MEMS/NEMS hybrids specified by double/single-clamped ZnO quantum wire micro/nano-electromechanical resonator hybrids are proposed. Through a comprehensive numerical simulation, it is revealed that the rich nonlinear dynamics of the resonator can be subtly transferred to the piezoelectric device, and the chaotic transmission in the piezoelectric device can arise in two-dimensional parameter space regarding time and incident electron energy. The hybrids, therefore, are endowed with the ability to detect amplitude changes by measuring ultra-sensitive quantum tunneling current. The study sheds light in developing quantum piezotronics and its related MEMS/NEMS integrations.