Three-dimensional machining of carbon nanotube forests using water-assisted scanning electron microscope processing

Rajabifar, Bahram; Kim, Sanha; Slinker, Keith; Ehlert, Gregory J.; Hart, A. John; Maschmann, Matthew R.

doi:10.1063/1.4932522

Cited by 12 publications

(7 citation statements)

References 38 publications

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“…Because the SEM-based techniques rely on a multiple-step chemical process, numerous processing variables may influence the milling rate and precision of the process. It has been previously observed that increasing acceleration voltage and beam current directly increase the milling rate because of an increased energy flux, as expected 11 . The effect of chamber pressure is less obvious.…”

Section: Introductionsupporting

confidence: 73%

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

Brown

Davis

Maschmann

2017

JoVE

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A nanoscale fabrication technique appropriate for milling carbon nanotube (CNT) forests is described. The technique utilizes an environmental scanning electron microscope (ESEM) operating with a low pressure water vapor ambient. In this technique, a portion of the electron beam interacts with the water vapor in the vicinity of the CNT sample, dissociating the water molecules into hydroxyl radicals and other species by radiolysis. The remainder of the electron beam interacts with the CNT forest sample, making it susceptible to oxidation from the chemical products of radiolysis. This technique may be used to trim a selected region of an individual CNT, or it may be used to remove hundreds of cubic microns of material by adjusting ESEM parameters. The machining resolution is similar to the imaging resolution of the ESEM itself. The technique produces only small quantities of carbon residue along the boundaries of the cutting zone, with minimal effect on the native structural morphology of the CNT forest.

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Section: Introductionsupporting

confidence: 73%

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

Brown

Davis

Maschmann

2017

JoVE

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“…These species then etch neighboring carbon atoms of the SWNTs to form CO, CO 2 , and various hydrocarbons. A similar etching phenomenon was reported in studies on CNT cutting 6 and the machining of CNT forests, 38 where CNTs were cut with a low-energy focused electron beam (with SEM) in the presence of water vapor inside the chamber.…”

Section: Threshold Field For Gap Extension: Voltage Vs Gap Sizesupporting

confidence: 68%

Field emission and anode etching during formation of length-controlled nanogaps in electrical breakdown of horizontally aligned single-walled carbon nanotubes

et al. 2016

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We observe field emission between nanogaps and voltage-driven gap extension of single-walled carbon nanotubes (SWNTs) on substrates during the electrical breakdown process. Experimental results show that the gap size is dependent on the applied voltage and humidity, which indicates high controllability of the gap size by appropriate adjustment of these parameters in accordance with the application. We propose a mechanism for the gap formation during electrical breakdown as follows. After small gaps are formed by Joule heating-induced oxidation, SWNTs on the anode side are electrochemically etched due to physically-adsorbed water from the air and the enhanced electric field at the SWNT tips. Field emission is measured in a vacuum as a possible mechanism for charge transfer at SWNT gaps. The relationship between the field enhancement factor and geometric features of SWNTs explains both the voltage dependence of the extended gap size and the field emission properties of the SWNT gaps. In addition, the similar field-induced etching can cause damage to adjacent SWNTs, which possibly deteriorates the selectivity for cutting metallic pathways in the presence of water vapor.

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“…To do so, the CNT growth catalyst could be deposited directly onto the roll before CNT growth, or CNTs could be grown on large-area flat substrates (for example, glass plates) and then transferred to a flexible substrate ( 75 ). In addition, to avoid the use of photolithography for stamp fabrication, CNT forests can be grown from a nonpatterned catalyst layer and then structured using subtractive methods ( 76 , 77 ) such as laser ablation.…”

Section: Discussionmentioning

confidence: 99%

Ultrathin high-resolution flexographic printing using nanoporous stamps

et al. 2016

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Three-dimensional machining of carbon nanotube forests using water-assisted scanning electron microscope processing

Cited by 12 publications

References 38 publications

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

Field emission and anode etching during formation of length-controlled nanogaps in electrical breakdown of horizontally aligned single-walled carbon nanotubes

Ultrathin high-resolution flexographic printing using nanoporous stamps

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