Three dimensional laser microfabrication in diamond using a dual adaptive optics system

Simmonds, Richard; Salter, Patrick S.; Jesacher, Alexander; Booth, Martin J.

doi:10.1364/oe.19.024122

Cited by 76 publications

(62 citation statements)

References 22 publications

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“…[ 9,23,24,26,28,29,33 ] However, they need to be used in conjunction with the z-axis of a piezo-stage or other means to allow for fabrication of 3D structures (reducing the effective writing speed in 3D printing). In the future, we expect these galvanometric mirror systems to be in competition with fast digital membrane mirror devices, [ 34 ] allowing for true 3D trajectories (see Section 2.3. In contrast, galvo-scanners tilt the wavefront of the structuring laser beam on the entrance pupil of the objective and, thus, lead to an accurate displacement of the focal spot within the fi eld of view of the objective ( Figure 1 a).…”

Section: Progress Reportmentioning

confidence: 99%

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

150

102

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functional elements, chiral photonic crystals, photonic metamaterials and quasicrystals. With this technology becoming commercially available, [ 1 ] many novel ideas have been realized by scientists around the world. Some of these developments can already be seen as new research areas enabled by 3D µ-printing.Many excellent reviews of the underlying technology have recently been published, and we give here just a short selection. [2][3][4][5] With the present progress report we want to summarize the tremendous technological development during the last fi ve years as well as to give an overview over some vastly growing research fi elds enabled by this development. As the number of research papers based on 3D µ-printing as enabling technology is exploding, we intend to categorize the most recent developments to identify future research directions and possible novel fi elds for the years to come. Recent Technological Advances in 3D µ-PrintingFrom the fi rst proof-of-principle in 1997, [ 6 ] the µ-printing community has continuously been expanding the structuring capabilities of µ-printing systems overcoming limitations such as structuring speed, sample volume, complicated pre and post processing, as well as minimum feature size and resolution. Progress is made along two directions: First, extending the aforementioned benchmarks of µ-printing systems. Second, techniques that move µ-printed structures towards functional devices. These two directions obviously are intertwined and require interdisciplinary research efforts on new photocurable materials, complex light-matter interaction, reaction kinetics as well as processes on a molecular level infl uencing structure formation. The most infl uential technological advances are summarized in this section.Section 2.1. covers recent work leading to a tremendous increase of the capabilities of µ-printing systems. Section 2.2. describes superresolution concepts exploiting light-matter interactions to achieve smaller feature sizes and higher structural resolution. Section 2.3. reviews spatial light modulator (SLM) based laser lithography providing additional degrees of freedom by shaping the wavefront of the laser beam. Laser Sources, Scanning Devices, and Writing GeometryThe high complexity of ultrafast fs-lasers drives the community to look for alternative laser sources, leading to cost and In this progress report the development of three-dimensional µ-printing and its impact as an enabling technology onto different scientifi c fi elds is reviewed. Driven by direct laser writing via two-photon absorption, the technology has reached a level of maturity and ease of application such that 3D printing on the micrometer scale can now be considered. While the underlying technology is still developing towards higher resolution and increasing speed of fabrication, the last fi ve years have seen new fi elds rising that were obviously enabled by 3D µ-printing. Among the recent technological developments discussed in this progress report are the fi elds of super-resolution lithography ...

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Section: Progress Reportmentioning

confidence: 99%

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

150

102

View full text Add to dashboard Cite

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“…This minimises the required peak power in order to reach the threshold intensity for material modification at the focal spot to below the critical power for self-focusing. As a result, the fabrication of structures with a small axial cross section even in a high band-gap and highly nonlinear material such as diamond is possible [111].…”

Section: Kerr Self-focusingmentioning

confidence: 99%

Ultrafast-laser-inscribed 3D integrated photonics: challenges and emerging applications

2015

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Since the discovery that tightly focused femtosecond laser pulses can induce a highly localised and permanent refractive index modification in a large number of transparent dielectrics, the technique of ultrafast laser inscription has received great attention from a wide range of applications. In particular, the capability to create three-dimensional optical waveguide circuits has opened up new opportunities for integrated photonics that would not have been possible with traditional planar fabrication techniques because it enables full access to the many degrees of freedom in a photon. This paper reviews the basic techniques and technological challenges of 3D integrated photonics fabricated using ultrafast laser inscription as well as reviews the most recent progress in the fields of astrophotonics, optical communication, quantum photonics, emulation of quantum systems, optofluidics and sensing.

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“…Aberrations affect the line focusing both spatially and temporally. As an example, we consider the aberration arising from a mismatch in the refractive index between an objective immersion (n 1 1.52) and a diamond sample (n 2 2.4), which is relevant for laser machining applications [23]. The second columns in Figs.…”

Section: Temporal Intensity Distributionmentioning

confidence: 99%

“…This scenario is modeled in Figs. 4(a) and 4(b) for both SF and SSTF, where we consider the aberration arising when the light is focused with a 1.4 NA oil (n 1 1.52) lens into a diamond sample (n 2 2.4) with a nominal focusing depth of 50 μm, focusing from the top of the profile [23]. The focus is distorted generating several sidelobes above the peak intensity point, with a corresponding reduction in peak hI 2 i.…”

Section: Index Mismatch Aberrationmentioning

confidence: 99%

“…It has been shown that phase aberrations may be compensated using adaptive optics elements (AOEs), such as liquid crystal spatial light modulators or deformable mirrors, either in microscopy [18,19], or laser fabrication systems [20][21][22][23][24]. However, until now, there has been no systematic analysis for the effects of aberrations in SSTF.…”

Section: Introductionmentioning

confidence: 99%

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Effects of aberrations in spatiotemporal focusing of ultrashort laser pulses

2014

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Spatiotemporal focusing, or simultaneous spatial and temporal focusing (SSTF), has already been adopted for various applications in microscopy, photoactivation for biological studies, and laser fabrication. We investigate the effects of aberrations on focus formation in SSTF, in particular, the effects of phase aberrations related to low-order Zernike modes and a refractive index mismatch between the immersion medium and sample. By considering a line focus, we are able to draw direct comparison between the performance of SSTF and conventional spatial focusing (SF). Wide-field SSTF is also investigated and is found to be much more robust to aberrations than either line SSTF or SF. These results show the sensitivity of certain focusing methods to specific aberrations, and can inform on the necessity and benefit of aberration correction.

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Three dimensional laser microfabrication in diamond using a dual adaptive optics system

Cited by 76 publications

References 22 publications

Three‐Dimensional μ‐Printing: An Enabling Technology

Three‐Dimensional μ‐Printing: An Enabling Technology

Ultrafast-laser-inscribed 3D integrated photonics: challenges and emerging applications

Effects of aberrations in spatiotemporal focusing of ultrashort laser pulses

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