2003
DOI: 10.1063/1.1533111
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Three-dimensional hydrogen microscopy using a high-energy proton probe

Abstract: It is a challenge to measure two-dimensional or three-dimensional ͑3D͒ hydrogen profiles on a micrometer scale. Quantitative hydrogen analyses of micrometer resolution are demonstrated utilizing proton-proton scattering at a high-energy proton microprobe. It has more than an-order-of-magnitude better position resolution and in addition higher sensitivity than any other technique for 3D hydrogen analyses. This type of hydrogen imaging opens plenty room to characterize microstructured materials, and semiconducto… Show more

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Cited by 13 publications
(2 citation statements)
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“…Twodimensional images of the hydrogen distribution can be obtained by scanning the sample surface and the sum of the kinetic energy of the two scattered protons can be used to generate a depth prole of the hydrogen content. 111,114,116,117 An energy loss of the transmitted and scattered protons occurs in dependence on the sample thickness.…”
Section: Methodsmentioning
confidence: 99%
“…Twodimensional images of the hydrogen distribution can be obtained by scanning the sample surface and the sum of the kinetic energy of the two scattered protons can be used to generate a depth prole of the hydrogen content. 111,114,116,117 An energy loss of the transmitted and scattered protons occurs in dependence on the sample thickness.…”
Section: Methodsmentioning
confidence: 99%
“…Application of the pulsed low energy positron annihilation technique would be very suitable due to possible depth profiling of specimens up to 600 nm. This technique in combination to other techniques like TEM and/or hydrogen depth profiling by Elastic Recoil Detection (ERD) [12] can observe H migration after its implantation in to specimens. It is a challenge to measure two-dimensional or three-dimensional hydrogen profiles on a nanometer scale.…”
Section: Introductionmentioning
confidence: 98%