Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization

Formanek, F.; Takeyasu, Nobuyuki; Tanaka, Takuo; Chiyoda, Kenta; Ishikawa, Atsushi; Kawata, Satoshi

doi:10.1364/opex.14.000800

Cited by 138 publications

(91 citation statements)

References 25 publications

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“…Lithography of 3D polymeric templates by DLW with lateral feature sizes in the 100 nm range has become routine 8,9,18 and is even available commercially 19 . Our vision is to take such a template and coat it with a silver film of a few tens of nanometres in thickness, for example leading to the 3D arrangement of magnetic split-ring resonators (SRR) shown in Fig.…”

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confidence: 99%

Photonic metamaterials by direct laser writing and silver chemical vapour deposition

et al. 2008

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Metamaterials are artificial materials that-unlike natural substances-enable magnetism to be achieved at optical frequencies 1-3 . The vast majority of photonic metamaterials 4,5 has been fabricated by electron-beam lithography and evaporation of metal films, both of which are well-established twodimensional (2D) technologies. Although stacking of three 6 or four 7 functional layers made using these methods has been reported, a truly 3D fabrication approach would be preferable for 3D photonic metamaterials. Here, we report first steps in this direction by using a combination of direct laser writing 8,9 and silver chemical vapour deposition 10,11 -the 3D analogues of electron-beam lithography and evaporation, respectively. The optical characterization of a planar test structure composed of elongated split-ring resonators is in good agreement with theory. Retrieval of the effective optical parameters reveals the importance of bi-anisotropy. Once suitable theoretical blueprints are available, our fabrication approach will enable rapid prototyping of truly 3D photonic metamaterials.The emerging field of photonic metamaterials is driven by the fascinating visions of perfect lenses 12 , optical cloaking 13,14 or quantum levitation 15 . Realizing these visions clearly ultimately requires large-scale three-dimensional (3D) metamaterials operating at optical frequencies. One of the major challenges concerns the (realistic) design and the nanofabrication of such structures. The latter is related to the fabrication of 3D (dielectric) photonic crystals, for which extensive literature is available (see, for example, the references in a recent review 16 ). It has become clear that polymeric templates made using holography and/or direct laser writing (DLW) can subsequently be converted into, for example, silicon structures using chemical vapour deposition (CVD) and/or atomic-layer deposition (ALD). In the context of metamaterials, however, metals are crucial; silver leads to the lowest losses at optical frequencies 17 . Yet, it has been unclear whether structures made using DLW and silver CVD would ever have sufficient quality and whether achievable feature sizes would result in metamaterials operating at optical frequencies. Fortunately, we report here that the answer is positive in both regards. Combined with suitable theoretical blueprints, which still need to be developed, this result means that one of the major hurdles in the field of photonic metamaterials is starting to disappear.Lithography of 3D polymeric templates by DLW with lateral feature sizes in the 100 nm range has become routine 8,9,18 and is even available commercially 19 . Our vision is to take such a template and coat it with a silver film of a few tens of nanometres in thickness, for example leading to the 3D arrangement of magnetic split-ring resonators (SRR) shown in Fig. 1a. Several questions arise immediately. (1) Silver films made using these methods are obviously always inherently connected-in sharp contrast to those made by electron-beam lithography...

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Photonic metamaterials by direct laser writing and silver chemical vapour deposition

et al. 2008

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“…Inherent interconnections render the fabrication feasible by direct laser writing and chemical vapor deposition. Lithography of bulk polymeric templates by DLW has widely been used [24][25][26] with sizes of less than 100 nm. Having the template interconnected one can use chemical vapor deposition to cover it with a thin metallic film and therefore one will have a 3D photonic metamaterial.…”

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Connected bulk negative index photonic metamaterials

et al. 2009

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“…As far as the coating method is concerned, there are several differences between our work and another similar study dealing with metalization of optically fabricated structures by silver [14]. First, we have used Ni which requires both sensitization and activation, whereas for silver only the activation is required.…”

Section: Coating Of Su-8 Templates By Nimentioning

confidence: 99%

“…Recently, fabrication of diffractive elements for soft X-ray optics by nickel (Ni) electroplating of SU-8 molds was reported [13]. Also, electroless plating was successfully applied for coating of silver on large microstructures opticaly fabricated in photo-curing resin [14]. The latter work emphasized the studies of metalization process of large polymeric structures, optically fabricated using a microlens array, as well as structural properties of the deposited silver film.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and properties of metalo-dielectric photonic crystal structures for infrared spectral region

Mizeikis¹,

Juodkazis²,

Tarozaitė³

et al. 2007

Opt. Express

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Abstract:We report structural and optical properties of three-dimensional periodic metallic woodpile structures obtained by direct laser writing in dielectric photoresist SU-8 and subsequent electroless coating by a thin Ni film. Signatures of photonic stop gaps were observed in optical reflection spectra of the structures at infrared wavelengths. This study demonstrates that the combination of DLW and chemical infiltration of metals is attractive as a simple and cost-efficient method for the fabrication of metalo-dielectric photonic crystals.

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Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization

Cited by 138 publications

References 25 publications

Photonic metamaterials by direct laser writing and silver chemical vapour deposition

Photonic metamaterials by direct laser writing and silver chemical vapour deposition

Connected bulk negative index photonic metamaterials

Fabrication and properties of metalo-dielectric photonic crystal structures for infrared spectral region

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