IEEE SENSORS 2014 Proceedings 2014
DOI: 10.1109/icsens.2014.6985065
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Three dimensional electric field measurement method based on coplanar decoupling structure

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Cited by 14 publications
(13 citation statements)
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“…e measurement of the 3D atmospheric electric field is the basis of smart localization. After analyzing the advantages and disadvantages of AEFA [7,8,[19][20][21][22], a 3D atmospheric electric field sensor structure is designed for atmospheric electric field measurement. Details are shown in Figure 4.…”
Section: Principle Of 3d Electric Field Measurementmentioning
confidence: 99%
See 2 more Smart Citations
“…e measurement of the 3D atmospheric electric field is the basis of smart localization. After analyzing the advantages and disadvantages of AEFA [7,8,[19][20][21][22], a 3D atmospheric electric field sensor structure is designed for atmospheric electric field measurement. Details are shown in Figure 4.…”
Section: Principle Of 3d Electric Field Measurementmentioning
confidence: 99%
“…From the aspects of material and structure [17][18][19][20][21], the researchers have improved the one-dimensional to threedimensional AEFA. Among them, Wen et al [19] proposed a three-dimensional measurement method based on coplanar decoupling structure to solve the coupling problem between 3D atmospheric electric field components.…”
Section: Introductionmentioning
confidence: 99%
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“…Aimed at developing MEMS-based 3D EFSs with low cross-axis coupling interference, some relevant works have been reported concerning algorithms and novel micromachined sensor structures. Wen [ 19 ] firstly derived a 3 × 3 coupling sensitivity matrix with pre-measured cross-axis sensitivities, and employed this matrix to compensate the measurement results from three typical one-dimensional (1D) EFSCs. Li [ 20 ] introduced a genetic algorithm (GA) to determine the coupling sensitivity matrix.…”
Section: Introductionmentioning
confidence: 99%
“…Wang et al [20] introduced a biaxial MEFS that can sense an in-plane electrostatic field but has no axis to sense the vertical component; the author asserted that monolithic 2D or 3D MEFSs require high structural integrity and an accurate decoupling calibration method. By deriving a coupling sensitivity matrix, Wen et al [23] and Fang et al [24] distributed three 1D MEFSs in-plane and orthogonally to measure a 3D electrostatic field. In their studies, the elimination of coupling interference among the three components of the electrostatic field simply relied on an algorithm instead of the structural design.…”
Section: Introductionmentioning
confidence: 99%