Three-dimensional distribution and propagation of dislocations in β-Ga2O3 revealed by Borrmann effect x-ray topography

Abstract

Synchrotron radiation x-ray topography (XRT) in a transmission configuration based on the Borrmann effect (BE) was carried out to observe characteristic dislocation structures and three-dimensional distribution and propagation of dislocations in β-Ga2O3 grown via the edge-defined film-fed growth (EFG) method. Substrates with a range of surface orientations of (001), (010), and (2¯01), cut perpendicular or parallel to the ⟨010⟩ growth direction of the EFG, were observed to understand the whole picture of dislocations distributed in the bulk crystals. Using the (001)-oriented substrate, we found characteristic dislocation structures such as dislocation helices, damage-related (001)-plane dislocation networks, and tangled dislocation complexes, which exist universally in EFG crystals but have rarely been reported before. A careful measurement of the dislocation length in BE-XRT images taken with different g-vectors allows us to determine the crystal plane on which a dislocation lies. The BE-XRTs taken from the (010)-oriented and (2¯01)-oriented substrates suggested that the dislocations propagating along the [010] growth direction were dominant. Most of these b-axis threading dislocations had a Burgers vector of [010] or [001], and they tended to align in the (100) plane. The BE-XRT observations in this study provide valuable knowledge for understanding the structure and character of dislocations in β-Ga2O3.