Three-Body Microcontact Model of Rough Surfaces and Its Application on Polishing of Wafer

Horng, Jeng Haur; Lee, Jian Shing; Du, Da‐Ming

doi:10.4028/www.scientific.net/msf.505-507.445

Cited by 17 publications

(3 citation statements)

References 9 publications

(18 reference statements)

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“…Ball rotates affected by the contact point of the approximate to the force of friction and centrifugal force on a plane, and small friction, if you ignore the other direction is as shown in Figure 3. The steel ball rotating centrifugal force generated [8]. Steel ball in high-speed rotating gyroscopic moment [9] can be expressed that:…”

Section: Force Analysismentioning

confidence: 99%

The Study on Contact Angle of High-Speed Ball Screw

Tang²,

Wang

2014

AMR

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This paper aims to develop a new systematic analysis model to predict the contact angle of ball screw in high-speed condition. In order to investigate the contact angle between the ball and raceway, a proper mechanics model of ball screw should be established. Then, considering the influence of centrifugal force at high speed, the change of contact angle will be analyzed and solved. Finally, the different factors on the influence of contact angle in different locations are analyzed. This study provides the theory basis of studying kinematics of ball screw in high speed.

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Section: Force Analysismentioning

confidence: 99%

The Study on Contact Angle of High-Speed Ball Screw

Tang²,

Wang

2014

AMR

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“…Horng et al proposed a 3-body microcontact model for rough surfaces to understand the influence of particles between surfaces on contact characteristics. Based on the simplification of this model, a 2-body microcontact simulation transitioning from surface-to-surface and particle-to-surface can be obtained (Horng et al, 2006). Zambrano et al analyzed the running-in period during abrasive wear processes of austenitic stainless steel AISI 316L and Hadfield (15%Mn-1.5%C) steel using a testing pin (flatended) -abrasive paper wear configuration.…”

Section: Introductionmentioning

confidence: 99%

Investigation of lubricant viscosity and third-particle contribution to contact behavior in dry and lubricated three-body contact conditions

Chen,

Horng

2024

Front. Mech. Eng.

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The generation of third particles and change in viscosity lead to the gradual degradation of the performance of the machine interface. The generation of third particles may come from wear debris or environmental particles, which form a three-body contact system at the contact interface. The viscosity of the lubricant will also change with the long-term operation of the components. This paper uses a three-body lubrication model to study the influence and interaction of lubricant viscosity change and the presence of third particles on the contact characteristics, including the real contact area, the particle contact area ratio, the solid load percentage, the film thickness, and the evolution of the lubrication regime. The results show that when the interface is in a three-body mixed lubrication regime, the dimensionless total real contact area increases with the increase in particle size and density at the same lubricant viscosity, while the trend is the opposite in dry contact and boundary lubrication interfaces. When viscosity decreases, a three-body contact interface is more prone to entering boundary lubrication than a two-body contact interface, resulting in surface damage. Regardless of surface roughness, particle size, and dry or lubricated contact conditions, the turning point of the contact area (TPCA) phenomenon is usually when the ratio of particle size to surface roughness is 0.8–1.3. Under the same ratio of particle size to surface roughness, the critical load of the TPCA phenomenon increases with the increase in third-particle size and surface roughness, but decreases with the increase in lubricant viscosity and particle density.

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“…In actual rough surfaces, the roughness has varying magnitude and direction. Horng [13,14] proposed a generalized elliptic elastic-plastic microcontact model (H model) that takes into account the directional nature of surface roughness for elliptic contact spots between anisotropic rough surfaces. Recently, Zhao et al (ZMC model) [15] and Kogut [16] presented elastic-plastic asperity models to modify the shortcoming of transition from elastic deformation to fully plastic in the other models.…”

Section: Introductionmentioning

confidence: 99%

The Microcontact Analysis of Contact Length between Wheel and Workpiece in Precise Grinding

Horng

Wei

Chen

et al. 2010

AMR

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This paper analyzes theoretically the contact length derived from elastic-plastic mechanics and microcontact theory with the aim of improving the traditional method of predicting roughness factor though experiments. The accuracy of the analysis is verified through experiments. It transpires from the theoretical model that the contact length between a grinding wheel and a workpiece increases with decreasing curvature radius of peak, increasing hardness of the workpiece as well as increasing depth of cut. It is also revealed that the contact length is directly proportional to the square of 0.32 of the hardness, approximately, whilst the square root of surface roughness and the density of peak of the grinding wheel show less influence on the contact length. The analysis method has reduced the variation between predicted and experimental values than that of the old methods. These results will be beneficial in analysing and designing the product quality of grinding.

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Three-Body Microcontact Model of Rough Surfaces and Its Application on Polishing of Wafer

Cited by 17 publications

References 9 publications

The Study on Contact Angle of High-Speed Ball Screw

The Study on Contact Angle of High-Speed Ball Screw

Investigation of lubricant viscosity and third-particle contribution to contact behavior in dry and lubricated three-body contact conditions

The Microcontact Analysis of Contact Length between Wheel and Workpiece in Precise Grinding

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