1998
DOI: 10.1117/12.327200
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Three-beam scanning laser radar microprofilometer

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Cited by 5 publications
(4 citation statements)
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“…It consists of a quadrant detector having four channels D (1)(2)(3)(4) ; filters F x (1)(2)(3)(4) and F y (1)(2)(3)(4) selecting the frequencies DF x and DF y ; and phase detectors PD x(1-4) and PD y (1)(2)(3)(4) . At the outputs of the detectors D (1)(2)(3)(4) , as a result of mixing of the frequencies f 0 , f x and f y , the components DF x and DF y appear, which are fed to the signal inputs of the phase detectors PD x(1-4) and PD y (1)(2)(3)(4) . The references of the same frequencies DF x and DF y , are obtained from the drivers controlling the acousto-optical deflectors.…”
Section: Methodsmentioning
confidence: 99%
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“…It consists of a quadrant detector having four channels D (1)(2)(3)(4) ; filters F x (1)(2)(3)(4) and F y (1)(2)(3)(4) selecting the frequencies DF x and DF y ; and phase detectors PD x(1-4) and PD y (1)(2)(3)(4) . At the outputs of the detectors D (1)(2)(3)(4) , as a result of mixing of the frequencies f 0 , f x and f y , the components DF x and DF y appear, which are fed to the signal inputs of the phase detectors PD x(1-4) and PD y (1)(2)(3)(4) . The references of the same frequencies DF x and DF y , are obtained from the drivers controlling the acousto-optical deflectors.…”
Section: Methodsmentioning
confidence: 99%
“…The references of the same frequencies DF x and DF y , are obtained from the drivers controlling the acousto-optical deflectors. The outputs of the phase detectors, denoted in Figure 3 as phase shifts φ x(1-4) and φ y (1)(2)(3)(4) , are used for computing the surface inclination along the trajectory of scanning. Figure 4 illustrates the above-mentioned three specific cases when the angle a between the axis X and the projection V xy of the line of maximal inclination V on the plane XY is 0° (Figure 4a fovea in the points of measurement A 0 , B 0 , C 0 are h x and h y respectively.…”
Section: Methodsmentioning
confidence: 99%
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“…Polishing movements were repeated only a few times to preserve the initial nano-topography of the surface between grooves. Intermediate results were checked by the laser differential phase profilometer [ 10 ] and scanning electron microscope. As a result, ten flat samples with directional grooves had been fabricated.…”
Section: Methodsmentioning
confidence: 99%