Thorium-free interference coatings for infrared applications

Laux, Sven; Bernitzki, Helmut; Fasold, D.; Gittler, Elvira; Schmidt, Frank; Weyh, Thomas; Wurlitzer, Gottfried

doi:10.1117/12.625146

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“…193nm ArF excimer laser lithography has become the main lithography technology which is extending to below the 32nm node and results in drastically increasing requirements for high performance ArF excimer laser light source [3]. As the ArF excimer lasers are developed for higher output power and frequency, it is demanding on low-loss optical components inside the resonance cavity [4].…”

Section: Introductionmentioning

confidence: 99%

Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser

Chang

Jin

et al. 2013

KEM

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ArF excimer laser is the main light resource for the microlithography technology. In the laser cavity, the optical components with lowest absorption and scattering loss are necessary. As a consequence only a few materials are promising candidates for 193nm coatings with high transmittance or high reflectance. Fluoride films exhibit relatively low optical loss as well as high laser induced damage thresholds. The potentiality of LaF3 and MgF2 is evaluated in respect of the production of improved optical coatings for applications. For this purpose, single layer is prepared by thermal evaporation at the deposited temperatures of 523K on Fused Silica. A first order bulk inhomogeneity model for extracting the optical constants of weak absorbing film is applied, which is based on spectrophotometry. Refractive index (n) and extinction coefficient (k) of the optimal LaF3 film are 1.678 and 2.24×10-3 at 193nm. In the case of the optimal MgF2 film, n and k are 1.443 and 4.72×10-4 at 193nm. High reflection (HR) LaF3/MgF2 coatings are designed and fabricated for normal incident on CaF2. The experimental results indicate that after coated and fluoride coatings deposit, according to optimal process, can have more suitable optical properties at deep ultraviolet (DUV), the reflectance of HR coatings reaches more than 98% at 193nm.

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Section: Introductionmentioning

confidence: 99%