1972
DOI: 10.1364/ao.11.000637
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Thin Organosilicon Films for Integrated Optics

Abstract: The continued development of integrated optics is heavily dependent upon the availability of materials that are suitable for the construction of thin-film optical circuitry and devices. We report here an investigation of new films made by an rf discharge polymerization process of organic chemical monomers. We concentrate our discussion on films prepared from vinyltrimethylsilane and hexamethyldisilbxane. These films are smooth, tough, pinhole-free, transparent from 0.4 microm to 0.75 microm, and exhibit very l… Show more

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Cited by 190 publications
(54 citation statements)
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“…On the other hand, the results with ELPPF coating were expected based on the reported good transparency of plasma polymer films awarding them to be used in optical applications [45]. For example, optically transparent plasma polymer films were synthesized by Tien et al and Couderc et al from hexamethyldisiloxane (HMDSO) and hydrocarbonate precursors, respectively [55,56].…”
Section: Citationmentioning
confidence: 99%
“…On the other hand, the results with ELPPF coating were expected based on the reported good transparency of plasma polymer films awarding them to be used in optical applications [45]. For example, optically transparent plasma polymer films were synthesized by Tien et al and Couderc et al from hexamethyldisiloxane (HMDSO) and hydrocarbonate precursors, respectively [55,56].…”
Section: Citationmentioning
confidence: 99%
“…In recent years, substantial progress has been made applying these films in applications ranging from optical waveguides, [1,2] optical filters and coatings, [3][4][5][6][7][8][9] photorefractive materials, [10,11] low-dielectric constant and low-refractive index materials, [12][13][14] display devices, [15] nonlinear optics, [16] light-emitting materials, [17] optical information recording, [18] and solar energy conversion. [19] Plasma polymerization (PP) of fluorine-containing materials has received special attention because these polymeric films possess a low dielectric constant and refractive index in addition to low surface energy, low coefficient of friction, low permeability constant, and good biocompatibility.…”
Section: Introductionmentioning
confidence: 99%
“…Indeed, organosilicon polymers are used on a large scale in a wide range of applications including: optical waveguides [1][2][3], corrosion protection layers [4][5][6], low-k (k = 2.7-3.5) thin films replacing silicon dioxide [7,8], membranes [9], biocompatible coatings [10], and selective cell-adhesive interfaces [11].…”
Section: Introductionmentioning
confidence: 99%