Thin Films Structural Parameters Research by Analytical Methods

Журавлева, П. Л.; Schur, P. A.; Мельников, А. А.

doi:10.18577/2307-6046-2019-0-6-104-113

Cited by 4 publications

(6 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Thin oxide films are currently widely used in the fabrication of structures for nano-and microelectronics de-vices, optoelectronics, acoustic electronics, microwave electronics as well as solar cells, optical and protective coatings in aircraft and space engineering etc. [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

“…Precision control of these parameters is of crucial importance for verifying whether synthesized films comply with the preset optical parameters of the final product [4]. This is especially difficult if the test film cannot be separated from the substrate [5].…”

Section: Introductionmentioning

confidence: 99%

“…Film thickness and refractive index are measured with nondestructive spectrophotometric methods. It has been reported [1,4,6,[13][14][15][22][23][24] that both the refractive n index and the thickness of films can be retrieved by analyzing the maxima and minima in the spectra of film transmittance (T, %) or reflectance (R, %) originating from light interference in the plane-parallel layer (film). However film absorption measurements are a more complex task.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

Козлова

Левашов

Kiryukhantsev-Korneev

et al. 2022

MoEM

View full text Add to dashboard Cite

Ta–Si–C–N single-layer films have been synthesized by direct current magnetron sputtering on fused quartz substrates. The structural perfection of the films has been studied using X-ray diffraction, scanning electron microscopy and glow discharge optical emission spectroscopy. The optical parameters of the films have been studied using multi-angle spectrophotometry. The spectral dependences of the transmission coefficients of substrates and structures were measured for normal incidence of light in the wavelength range 200–2500 nm. We show that the transmittance spectrum of the specimen has an oscillating pattern due to interference phenomena that are typical for layered structures. The reflectance of the films and the substrates has been measured in the 200–2500 nm region for small incidence angles. The difference between the reflection coefficient at the maximum of the interference of the film and the corresponding reflection coefficient of the substrate at the same wavelength shows that the absorption in the film is low. A formula for determination of the film absorption index based on the measured parameters has been derived. The experimental and calculated data have been used for plotting the absorption spectra of the substrate, structure and film. Discrete refractive indices in the 400–1200 nm region have been calculated for reflections at two incidence angles by determining the positions of interference maxima in the reflectivity spectral responses. The results have been approximated using the Cauchy equation. The film thickness has been estimated to be df = 1046 nm ± 13%. The spectra of film extinction coefficients have been plotted with and without allowance for reflection. Obtained values of the refractive and absorption indices with and without reflection have been summarized in a table.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

Козлова

Левашов

Kiryukhantsev-Korneev

et al. 2022

MoEM

View full text Add to dashboard Cite

show abstract

“…В настоящее время прозрачные тонкие пленки оксидов широко используются для создания структур в устройствах нано-и микроэлектроники, оптоэлектроники, акустоэлектроники, сверхвысокочастотной электроники, а также солнечных элементов, оптических и защитных покрытий в авиации, космонавтике и др. [1][2][3][4][5][6].…”

Section: Introductionunclassified

“…Точный контроль этих параметров является критически важным для установления соответствия полученных пленок заданным оптическим характеристикам конечных изделий [4]. Это является особенно сложным в тех случаях, когда пленку невозможно отделить от подложки [5].…”

Section: Introductionunclassified

The possibilities of multi-angle spectrophotometry for determining the parameters of films on single-layer structures

Козлова

Левашов

Kiryukhantsev-Korneev

et al. 2022

Izv. vysš. učebn. zaved., Mater. èlektron. teh.

View full text Add to dashboard Cite

Single-layer Ta-Si-C-N films on fused quartz substrates were made by direct current magnetron sputtering. The structural perfection of the film was investigated by X-ray diffraction analysis, scanning electron microscopy and optical emission spectroscopy of glow discharge. The optical parameters of the films were determined by the method of multi-angle spectrophotometry. Spectral dependences of the transmission coefficients of substrates and structures at normal light incidence in the wavelength range of 200—2500 nm are obtained. It is shown that the transmission spectrum of the sample has an oscillating character, which is caused by interference phenomena characteristic of layered structures. Spectral dependences of the reflection coefficients of films and substrates in the wavelength range of 200—2500 nm at small angles of incidence of light are obtained. By the magnitude of the difference between the reflection coefficient at the maximum of the interference of the film and the corresponding reflection coefficient of the substrate at the same wavelength, it is shown that the absorption in the film is low. A formula is obtained for determining the absorption coefficient of a film from the measured parameters. Based on the experimental data obtained, spectral dependences of the absorption coefficients of the substrate, structure and film are constructed. The method of reflection at two angles of incidence, based on the determination of the position of the interference extremes on the spectral dependences of the reflection coefficients, calculated discrete values of the refractive coefficients in the wavelength range 400—1200 nm. The obtained values are approximated by the Cauchy equation. The film thickness was calculated, which was d = 1046 nm ± 13%. Spectral dependences of the film attenuation indices with and without reflection are constructed. A summary table is presented with the obtained values of the refractive coefficients and absorption indices with and without reflection.

show abstract

Methodological Approaches to Research of Multilayer Thin-Film Systems and Interfaces in Composite Materials

et al. 2021

View full text Add to dashboard Cite

Thin Films Structural Parameters Research by Analytical Methods

Cited by 4 publications

References 0 publications

Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

The possibilities of multi-angle spectrophotometry for determining the parameters of films on single-layer structures

Methodological Approaches to Research of Multilayer Thin-Film Systems and Interfaces in Composite Materials

Contact Info

Product

Resources

About

Thin Films Structural Parameters Research by Analytical Methods

Cited by 4 publications

References 0 publications

﻿Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

﻿Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

The possibilities of multi-angle spectrophotometry for determining the parameters of films on single-layer structures

Methodological Approaches to Research of Multilayer Thin-Film Systems and Interfaces in Composite Materials

Contact Info

Product

Resources

About

Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures