Thin films generated by plasma immersion ion implantation and deposition of hexamethyldisilazane mixed with nitrogen in different proportions

Abstract

Abstract. In this work, it was used a plasma system composed of a cylindrical stainless steel reactor, a radio-frequency (13.56MHz) power source fixed at either 25 W or 70 W, a power source with a negative bias of 10kV and a 100Hz pulse. The system worked at an operational pressure of 80mTorr which consisted of varying concentrations of the monomer HMDSN and gaseous nitrogen in ratios: HMDSN (mTorr)/nitrogen (mTorr) from 70/10 to 20/60 in terms of operational pressure. The structural characterization of the films was done by FTIR spectroscopy. Absorptions were observed between 3500 cm -¹ to 3200 cm -¹, 3000 cm -¹ to 2900 cm -¹, 2500 cm -¹ to 2000 cm -¹, 1500 cm -¹ to 700 cm -¹, corresponding, respectively, to OH radicals, C-H stretching bonds in CH2 and CH3 molecules, C-N bonds, and finally, strain C-H bonds , Si-CH3 and Si-N groups, for both the 70 W and the 25 W.The contact angle for water was approximately 100° and the surface energy is near 25mJ/m² which represents a hydrophobic surface, measured by goniometric method. The aging of the film was also analyzed by measuring the contact angle over a period of time. The stabilization was observed after 4 weeks. The refractive index of these materials presents values from 1.73 to 1.65 measured by ultraviolet-visible technique.

Thin films growth by PIIID technique from hexamethyldisilazane/argon mixture

“…The refractive index decreases from 1.64 to 1.56 as the argon proportion in HMDSN/Ar ratio increases. This slight tendency in the behavior of the refractive index was also observed in films obtained by PIIID of HMDSN/nitrogen [3]. The alterations in the optical properties of the films can be attributed to the random structure of the chains in a plasma polymer, which makes theoretical interpretation of the experimental results rather difficult.…”

“…This observation is in agreement with the results obtained in other studies in which plasma polymerized acetylene and HMDSN films treated with nitrogen by using plasma immersion ion implantation and plasma immersion ion implantation and deposition. [3,[17][18][19][20]. Fig.…”

“…The curves have been offset vertically for clarity. The transmittance spectra show the characteristic peaks [3,[17][18] summarized in Table 1. The intensity of the absorption band associated to the N-H bond is weaker at HMDSN(20)/Argon(60) mTorr partial pressure.…”

“…Plasma immersion ion implantation and deposition (PIIID) is an important process for the production of novel materials [1][2][3][4][5]. Plasma polymers which have specific mechanical, electrical, optical and wettable properties and which also show good adhesion to the substrate may be produced.…”

Cotton fabric surface treatment by plasma-deposited hexamethyldisilazane thin films

“…In addition, plasma polymerized thin films using HMDSN/nitrogen and HMDSN/argon compounds were prepared, these films had a wettability property and could be used in industrial applications such as electronics, electrics, and other fields (Kodaira et al, 2015;Kodaira et al, 2012).…”