Lu 1-x Eu x ) 2 O 3 smooth, crack-free, transparent films were prepared by the Pechini sol-gel method and a spin-coating technique. Thermogravimetric analysis, differential thermal analysis and FITR spectroscopy were used to study the chemical processes during annealing of the films. Film structure, morphology and optical properties were investigated. X-ray diffraction (XRD) analysis reveals the cubic phase of (Lu 1-x Eu x ) 2 O 3 films annealed in the 600-1000°C temperature range. Smooth and crack-free films with thicknesses of 250-1000 nm were obtained in the 600-800°C temperature range. The thickness upper limit (1000 nm) of morphological stability of films (Lu 1-x Eu x ) 2 O 3 on sapphire substrates has been studied.