2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2015
DOI: 10.1109/transducers.2015.7181023
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Thin-film piezoelectric transformers operating in harmonics of out-of-plane flexure modes

Abstract: This paper documents disc-shaped flexure-mode piezoelectric transformers constructed with 0.5 μm leadzirconate-titanate (PZT) on 4-μm silicon resonators. The transformers are electrode shaped to excite out-of-plane flexure modes at ~12, ~34, and ~63 MHz.The incorporation of silicon enables the excitation of out-ofplane flexural modes which exploit large quasi-static material coupling factors (using both e 31 and e 32 ).

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Cited by 12 publications
(1 citation statement)
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“…Their high voltage gain allow for low start-up of thermal-based energy harvester [7,8]. Finally, research is now going in the direction of transformer size reduction by integration of the PT with micro-electronic techniques [9,10]. These foregoing progresses allow for complete integration of power converter and higher working frequencies.…”
Section: Introductionmentioning
confidence: 99%
“…Their high voltage gain allow for low start-up of thermal-based energy harvester [7,8]. Finally, research is now going in the direction of transformer size reduction by integration of the PT with micro-electronic techniques [9,10]. These foregoing progresses allow for complete integration of power converter and higher working frequencies.…”
Section: Introductionmentioning
confidence: 99%