“…Vanadium oxide phases have been synthesized by several methods such as sol–gel, pulsed laser deposition, sputtering, , atomic layer deposition (ALD), , or chemical vapor deposition (CVD). − The synthesis of VO 2 (M1) films by aerosol-assisted and atmospheric pressure CVD has been extensively investigated mainly due to their easy scalability, lower restriction on volatility of the precursors, and easy introduction of dopants in films. − Nevertheless, the deposition of monoclinic VO 2 (M1) is only possible in a narrow temperature window around 550 °C and usually only a limited control over surface morphology has been observed. , Nanostructured surface morphologies play an important role in the thermochromic performance of VO 2 films in terms of phase transition temperature and visible light transmission. − Recently, Binions et al reported the use of an electric field in an aerosol-assisted and atmospheric pressure CVD and demonstrated a reduction in the crystallite size and phase transition temperature. , A more common technique is the low pressure CVD, which allows a precise control of film texturing and composition, due to deposition temperature and proper choice of precursors. , …”