Abstract:In this study, antimony doped tin oxide lms were deposited on multiwall carbon nanotube buckypaper and Cr coated stainless steel substrates using a radio frequency magnetron sputtering process in a mixed oxygen/argon (5/95) gas environment. The depositions of antimony doped tin oxide on the multiwall carbon nanotube buckypaper and stainless steel substrates were carried out using the parameters organized as: target composition antimony doped tin oxide (SnO2:Sb = 90:10 wt%); total system pressure 1 Pa; sputteri… Show more
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