Thin film membrane based on a-SiGe: B and MEMS technology for application in cochlear implants

Heredia, A.; Ambrosio, Roberto; Moreno, Mario; Zúñiga, Carlos; Pérez, Abimael Jiménez; Monfil, K.; Hidalga, J.

doi:10.1016/j.jnoncrysol.2011.12.101

Cited by 5 publications

(4 citation statements)

References 13 publications

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“…Recent advances in the complementary metal oxide semiconductor (CMOS) and micro-electro-mechanical systems (MEMS) technologies have allowed the fabrication of CMOS-MEMS devices that can be used on diverse areas such as agriculture, communications, environment, medicine and biomedical applications [ 1 , 2 , 3 , 4 , 5 ]. The biocompatibility is the capability of not to elicit a negative physiological response while maintaining functionality within the body environment [ 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

Biocompatibility and Surface Properties of TiO2 Thin Films Deposited by DC Magnetron Sputtering

et al. 2014

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We present the study of the biocompatibility and surface properties of titanium dioxide (TiO2) thin films deposited by direct current magnetron sputtering. These films are deposited on a quartz substrate at room temperature and annealed with different temperatures (100, 300, 500, 800 and 1100 °C). The biocompatibility of the TiO2 thin films is analyzed using primary cultures of dorsal root ganglion (DRG) of Wistar rats, whose neurons are incubated on the TiO2 thin films and on a control substrate during 18 to 24 h. These neurons are activated by electrical stimuli and its ionic currents and action potential activity recorded. Through X-ray diffraction (XRD), the surface of TiO2 thin films showed a good quality, homogeneity and roughness. The XRD results showed the anatase to rutile phase transition in TiO2 thin films at temperatures between 500 and 1100 °C. This phase had a grain size from 15 to 38 nm, which allowed a suitable structural and crystal phase stability of the TiO2 thin films for low and high temperature. The biocompatibility experiments of these films indicated that they were appropriated for culture of living neurons which displayed normal electrical behavior.

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Section: Introductionmentioning

confidence: 99%

Biocompatibility and Surface Properties of TiO2 Thin Films Deposited by DC Magnetron Sputtering

et al. 2014

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“…A similar concept to ours was presented in paper [11] but the pattern of sensing electrode and the applied pressures for CI characterization is more likely not suitable for implant application.…”

Section: Introductionmentioning

confidence: 89%

Design and Fabrication of Fully Implantable MEMS Cochlea

Svatoš

Pekárek

Dušek

et al. 2015

Procedia Engineering

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The micro-electro-mechanical array for application as fully implantable cochlea is presented in this paper. The complete system including a short overview of energy harvesting and the system configuration is proposed. This study mainly covers mechanical properties of cochlea microfabricated silicon structure. Electro-mechanical simulations are proceeded to optimize the material used for resonators, the size of array membranes and to estimate the resistive change due to the input sound signal. The sound is detected by thin Si X N Y diaphragm due to resonant frequency and the displacement of the membrane caused by acoustic pressure. The displacement is detected employing piezoresistive electrodes (NiCr). Design and fabrication process based on MEMS technology are described and discussed. The response measurement of the cochlea structure is performed. The sizes of the membranes vary from (0.5 × 0.5) mm to (2.0 × 2.0) mm and the average current change is 6.55•10 -3 % corresponding to the acoustic pressure of 0.01 Pa.

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“…For ABMs, mechanical frequency selectivity is achieved by varying structural parameters, such as the width of the membrane, beam length, and beam thickness . In addition, acoustic‐to‐electrical energy conversion is realized via the piezoelectric effect, piezoresistive effect, capacitive sensing, optical readout method, and triboelectric effect . Recently, the piezoelectric and triboelectric effect have been actively used to implement self‐powered ABMs without an external power source.…”

Section: Introductionmentioning

confidence: 99%

Biomimetic Artificial Basilar Membranes for Next‐Generation Cochlear Implants

Jang

Choi

2017

Adv Healthcare Materials

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Patients with sensorineural hearing loss can recover their hearing using a cochlear implant (CI). However, there is a need to develop next-generation CIs to overcome the limitations of conventional CIs caused by extracorporeal devices. Recently, artificial basilar membranes (ABMs) are actively studied for next-generation CIs. The ABM is an acoustic transducer that mimics the mechanical frequency selectivity of the BM and acoustic-to-electrical energy conversion of hair cells. This paper presents recent progress in biomimetic ABMs. First, the characteristics of frequency selectivity of the ABMs by the trapezoidal membrane and beam array are addressed. Second, to reflect the latest research of energy conversion technologies, ABMs using various piezoelectric materials and triboelectric-based ABMs are discussed. Third, in vivo evaluations of the ABMs in animal models are discussed according to the target position for implantation. Finally, future perspectives of ABM studies for the development of practical hearing devices are discussed.

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Thin film membrane based on a-SiGe: B and MEMS technology for application in cochlear implants

Cited by 5 publications

References 13 publications

Biocompatibility and Surface Properties of TiO2 Thin Films Deposited by DC Magnetron Sputtering

Biocompatibility and Surface Properties of TiO2 Thin Films Deposited by DC Magnetron Sputtering

Design and Fabrication of Fully Implantable MEMS Cochlea

Biomimetic Artificial Basilar Membranes for Next‐Generation Cochlear Implants

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