2012
DOI: 10.1063/1.3697750
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Thin film measurement system for moving objects based on a laterally distributed linear variable filter spectrometer

Abstract: Instantaneous measurement of optical or geometrical parameters of thin layers is an ambitious aim in many industrial applications. These layers have a variety of use-cases, such as optical bandpassing, dielectric permittivity, or lubrication. Mostly, these layers are in motion due to the production process. In order to observe process parameters, the motion usually has to be disrupted. Thus, the increase of production time due to control purposes is an undesirable drawback of this otherwise suitable technique.… Show more

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Cited by 9 publications
(8 citation statements)
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“…The linear dispersion coefficient of the designed film system is 40 nm/mm, which means that the measured spectrum within a certain sampling range is the average value within the region. The average spectral and spatial effect can deform the measured spectral curve and decrease the transmittance of the central wavelength [24]. The specific transmittance is shown in Equation 3:…”
Section: Resultsmentioning
confidence: 99%
“…The linear dispersion coefficient of the designed film system is 40 nm/mm, which means that the measured spectrum within a certain sampling range is the average value within the region. The average spectral and spatial effect can deform the measured spectral curve and decrease the transmittance of the central wavelength [24]. The specific transmittance is shown in Equation 3:…”
Section: Resultsmentioning
confidence: 99%
“…The resolution of the LVF was analyzed in a previous work [12]. Considering the resolution of the LVF and the pixel size of the CMOS 2D sensor array, the system resolution is 1.6% of the LVF center wavelength.…”
Section: Methodsmentioning
confidence: 99%
“…Even though we designed the width of the LVF to conjugate with the width of a pixel, the LVF is imaged on two rows of pixels due to diffraction and misalignment of imaging system. Considering an arbitrary wavelength λ, the transmittance of the LVF varies along with the length [14], as illustrated in Fig. 4.…”
Section: A Spectrum Imaging Modelmentioning
confidence: 99%
“…During the calibration process, the linear polarizer is rotated from 0 • to 180 • and the imager takes image after every β = 1 • change. The recorded image data at any polarization angle should satisfy (14) and can be rewritten as:…”
Section: B Calibration Of Polarization Coefficientsmentioning
confidence: 99%