Thin-film Li-doped NiO for thermoelectric hydrogen gas sensor

Matsumiya, Masahiko; Qiu, Fabin; Shin, Woosuck; Izu, Noriya; Murayama, Norimitsu; Kanzaki, Shuzo

doi:10.1016/s0040-6090(02)00762-9

Cited by 122 publications

(57 citation statements)

References 7 publications

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“…Among these oxides, nickel oxide (NiO) has attracted considerable attention from those interested in the application to devices working in ultraviolet regions, with the interest specially lying in its wide band gap [4].…”

Section: Introductionmentioning

confidence: 99%

Optical, Physical, Chemical and Electrical Properties of Nickel Oxide Sprayed Thin Films under Tin Doping Effects

Amor¹,

Hamzaoui²,

Boukhachem³

et al. 2015

Advances in Ceramic Science and Engineering

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Tin-doped nickel oxide thin films have been successfully prepared by spray pyrolysis technique on glass substrates at 460°C. The effects of tin doping on structural, optical, and electrical properties were investigated. X-ray diffraction pattern reveals that all prepared thin films have cubic structure with (111) preferred orientation. The surface topography of these films was performed by atomic force microscopy. Optical measurements show a high transparency in the visible range around 95%. The optical band gap Eg decreases with Sn content from 3.633 to 3.54 eV. PL measurements show some bands transition which shift irregularly with Sn doping. Finally, the electric conductivity of NiO thin film was investigated through the impedance spectroscopy measurements in the frequency range 5 Hz-13 MHz at various temperatures. These measurements show a thermally activation of the electric. AC conductivity of NiO thin films is investigated through Jonscher law. Also, from these measurements, dielectric parameters were calculated.

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Section: Introductionmentioning

confidence: 99%

Optical, Physical, Chemical and Electrical Properties of Nickel Oxide Sprayed Thin Films under Tin Doping Effects

Amor¹,

Hamzaoui²,

Boukhachem³

et al. 2015

Advances in Ceramic Science and Engineering

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“…Another important application of NiO is in a battery system [10,11]. Non-stoichiometric nickel oxide is a good P-type semiconductor owing to its defect structure [12] and it is also a potential gas sensor for H 2 [13]. These applications can be enhanced by decreasing the particle size, preferably to less than 10 nm, and are highly dependent on particle size; the precise control of the size and distribution in a nanometer regime is required.…”

Section: Introductionmentioning

confidence: 99%

Preparation and characterization of nanosized nickel oxide

Wang

Gau

et al. 2005

Catal Lett

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Nanosized nickel oxide was synthesized by a simple liquid-phase process to obtain the hydroxide precursor and then calcined to form the oxide. The precursor and the nickel oxide were characterized by X-ray diffraction (XRD), infrared spectroscopy (IR), thermal analysis (TG) and temperature-programmed reduction (TPR). The results indicated that the particle size of nickel oxide was controlled by the calcined temperature (T C ). Mixed phases of nickel oxide and nickel hydroxide were present as the T C was lower than 300°C. Non-stoichiometric nickel oxide (NiO x , x = 1.2) was formed between 250°C and 400°C and a pure nickel oxide was formed as the T C arrived 500°C. The particle size of nickel oxide changed as the calcined temperature was controlled under 250°C, 300°C, 400°C and 500°C, the order was 5.6 nm, 6.5 nm, 11 nm and 17 nm, respectively.

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“…Consequently, the surface coverage of atomic oxygen is decreased. Since the electrical conductivity of the sensing layer is proportional to the nickel cation concentration of NiO (Matsumiya et al 2002), its conductivity is increased through the adsorption and reaction of formaldehyde. This conductivity increase leads to a reduction in the measured resistance.…”

Section: Catalysismentioning

confidence: 99%

MEMS-based formaldehyde gas sensor integrated with a micro-hotplate

et al. 2006

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This paper presents a novel micro-fabricated formaldehyde gas sensor with enhanced sensitivity and detection resolution capabilities. The device comprises a quartz substrate with Pt heaters as a micro-hotplate and deposited formaldehyde-sensing layer on it. A sputtered NiO thin film is used as the formaldehyde-sensing layer. A specific orientation of NiO becomes more apparent as the substrate temperature increases in the sputtering process, which helps the formation of NiO material with a correct stoichiometric ratio. The gas sensor incorporates Pt heating resistors integrated with a micro-hotplate to provide a heating function and utilizes Au inter-digitated electrodes. When formaldehyde is present in the atmosphere, oxydation happens near the sensing layer with a high temperature caused by the micro-hotplate and causes a change in the electrical conductivity of the NiO film. Therefore, the measured resistance between the inter-digitated electrodes changes correspondingly. The application of a voltage to the Pt heaters causes the temperature of the micro-hotplate to increase, which in turn enhances the sensitivity of the sensor. The nanometer scale grain size of the sputtered oxide thin film is conducive to improving the sensitivity of the gas sensor. The experimental results indicate that the developed device has a high stability (0.23%), a low hysteresis value (0.18%), a quick response time (13.0 s), a high degree of sensitivity (0.14 X ppm À1 ), and a detection capability of less than 1.2 ppm.

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Thin-film Li-doped NiO for thermoelectric hydrogen gas sensor

Cited by 122 publications

References 7 publications

Optical, Physical, Chemical and Electrical Properties of Nickel Oxide Sprayed Thin Films under Tin Doping Effects

Optical, Physical, Chemical and Electrical Properties of Nickel Oxide Sprayed Thin Films under Tin Doping Effects

Preparation and characterization of nanosized nickel oxide

MEMS-based formaldehyde gas sensor integrated with a micro-hotplate

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