Novel thin film fuel cell based on the 100 nm-thick electrolyte of amorphous ZrP 2.6 O x , working at 400 C, was demonstrated. The hydrogen permeable membrane fuel cell (HMFC) using a Pd foil as a nonporous solid anode was fabricated. Ni interlayer of several hundreds nm thickness was introduced between the Pd anode and the ZrP 2.6 O x electrolyte in order to suppress the deterioration of the electrolyte nanofilm by the deformation of the Pd anode during hydrogen absorption. In the ZrP 2.6 O x electrolyte the transport number of proton was unity at 400 C as determined by an EMF measurement. The modification of the Ni anode surface by an ultrathin Pt or Pd layer effectively decreased the anode/electrolyte interfacial polarization. Consequently, the HMFC revealed the OCV of 1.0 V and the maximum power density of 1.8 mW cm À2 at 400 C.