Thin-film gas sensors based on semiconducting metal oxides

Meixner, H.; Gerblinger, J.; Lampe, U.; Fleischer, Maximilian

doi:10.1016/0925-4005(94)01266-k

Cited by 215 publications

(85 citation statements)

References 11 publications

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“…Tungsten oxide thin films have been extensively researched because of their important applications for electrochromic device, 1,2) gas sensor of NO 2 , H 2 S and NH 3 , [3][4][5] and multi-layer optical disk 6) etc. Thermal properties should be considered in these applications where the heat flow exists.…”

Section: Introductionmentioning

confidence: 99%

Thermal Conductivity Measurement of Tungsten Oxide Nanoscale Thin Films

Wang

Goto

et al. 2006

Mater. Trans.

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The out-of-plane thermal conductivity of sputtered tungsten oxide thin films with thickness of 100 to 300 nm was measured by two omega method based on a new analytical model with consideration of the interfacial thermal resistance between the films and the substrate. The influence of the tungsten oxide structure on the thermal conductivity was studied. The result reveals that the tungsten oxide thin films made with 10% reactive gas of oxygen had a mixed phase of WO 2 and WO 3 , while those made with 100% oxygen were WO 3 only. The thermal conductivity of WO 3 thin films is 1.63 Wm À1 K À1 , and that of WO 2 /WO 3 films is 1.28 Wm À1 K À1 . The difference is explained by a higher thermal resistance at the interface of WO 2 and WO 3 crystals caused by the mismatch of phonon state.

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Section: Introductionmentioning

confidence: 99%

Thermal Conductivity Measurement of Tungsten Oxide Nanoscale Thin Films

Wang

Goto

et al. 2006

Mater. Trans.

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“…1. The X-ray patterns indicate that ZnO crystalize in hexagonal (wurtzite) crystal structure with space group (P 63mc) and cell parameters (a = 3.249 Å and c = 5.205 Å) [4,5]. Figure 1 does not show any change in the crystal structure during the milling of the powder.…”

Section: Resultsmentioning

confidence: 92%

ZnO Nanopowders as Chemical Sensor to Malathion Vapor

et al. 2014

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Thick lms of zinc oxide (ZnO) nanopowders have been prepared by high energy ball-milling for various spans of mill time (318 h). The morphology and crystal structure of the prepared ZnO powder were characterized by scanning electron microscope and X-ray diraction. The ZnO thick lms were then used to construct a gas sensor for O,O-dimethyl dithiophosphate of diethyl mercaptosuccinate (malathion) at dierent operating temperatures. The sensor response at 100 ppm of malathion was found to reach a maximum as large as 80 at 6 h of high energy ball-milling, four times larger than that found for ethanol. Scanning electron microscope observation of the granular state and pore size distribution analyses indicated that increasing high energy ball-milling time gave rise especially to an increase in the volume of pores in the pore size range of 635 nm. It is suggested that such a change in nanostructure is responsible for the marked promotion of the response to malathion.

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“…It is worth noting that for some cases, there also exist chemical processes in the film bulk that contribute to the transport of electric charge, particularly when ionic migration and transport is possible. Consequently, monitoring changes in the electron transport properties provides information that allows the evaluation of the sensor functionality to target gas-phase species [4][5][6]11,13,[15][16][17][18][19][20]22]. Despite the thermal stress caused by cyclical temperature changes, the thin-film conductance profile showed good reproducibility (± 6 %) and signal stability for both the conductance value corresponding to the reference state (20 % O 2 in N 2 , T = 200 °C) and those at operating temperatures (300, 400, 500 °C).…”

Section: Sensor Functionality Studymentioning

confidence: 99%

Copper tungstate thin-films for nitric oxide sensing

Gonzalez

Dunford

et al. 2012

Sensors and Actuators B: Chemical

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/npsi/ctrl?lang=en http://nparc.cisti-icist.nrc-cnrc.gc.ca/npsi/ctrl?lang=fr Access and use of this website and the material on it are subject to the Terms and Conditions set forth at http://nparc.cisti-icist.nrc-cnrc.gc.ca/npsi/jsp/nparc_cp.jsp?lang=en NRC Publications Archive Archives des publications du CNRCThis publication could be one of several versions: author's original, accepted manuscript or the publisher's version. / La version de cette publication peut être l'une des suivantes : la version prépublication de l'auteur, la version acceptée du manuscrit ou la version de l'éditeur. For the publisher's version, please access the DOI link below./ Pour consulter la version de l'éditeur, utilisez le lien DOI ci-dessous.http://dx.doi.org/10.1016/j.snb.2012.06.067 Sensors and Actuators B: Chemical, 173, pp. 169-176, 2012-07-08 Copper tungstate thin-films for nitric oxide sensing Gonzalez, C. M.; Du, X.; Dunford, J. L.; Post, M. L.

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Thin-film gas sensors based on semiconducting metal oxides

Cited by 215 publications

References 11 publications

Thermal Conductivity Measurement of Tungsten Oxide Nanoscale Thin Films

Thermal Conductivity Measurement of Tungsten Oxide Nanoscale Thin Films

ZnO Nanopowders as Chemical Sensor to Malathion Vapor

Copper tungstate thin-films for nitric oxide sensing

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