Thin film deposition using rarefied gas jet

Pradhan, Sahadev

doi:10.2514/6.2017-2331

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2023

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“…Young and Sedwick 2 performed plume impingement experiments to study different impingement effects. Recently, using two-dimensional (2D) DSMC simulations, Pradhan 16 studied the rarefied gas jet of aluminum to understand the flow phenomena and deposition mechanisms in a physical vapor deposition process. Yaskin et al 17 developed a technique for visualizing supersonic under-expanded gas jets flowing from sonic or supersonic nozzles into a rarefied space with a pressure of 0.2−100 Pa.…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional unsteady phenomenon in extensive interaction area driven by counter-flow jets and rarefied hypersonic free stream based on direct simulation Monte-Carlo simulation

Peng

et al. 2023

Preprint

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Based on the Direct Simulation Monte Carlo (DSMC) method, an unsteady flow, which is caused by the interaction of two counter-flow jets with a hypersonic free stream, is constructed and simulated in the rarefied regime for the flight altitude of 90 km. In this complex three-dimensional rarefied flow, although the hypersonic free stream and all counter-flow jets are stable, their interaction area has great instability. This signifies that this extensive interaction area will not reach a final stable state in the DSMC simulation process. This study exhibits the unsteady evolution of the interaction area.

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Section: Introductionmentioning

confidence: 99%

Three-dimensional unsteady phenomenon in extensive interaction area driven by counter-flow jets and rarefied hypersonic free stream based on direct simulation Monte-Carlo simulation

Peng

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

Thin film deposition using rarefied gas jet

Cited by 1 publication

References 17 publications

Three-dimensional unsteady phenomenon in extensive interaction area driven by counter-flow jets and rarefied hypersonic free stream based on direct simulation Monte-Carlo simulation

Three-dimensional unsteady phenomenon in extensive interaction area driven by counter-flow jets and rarefied hypersonic free stream based on direct simulation Monte-Carlo simulation

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