Thin-film composite resonators on crystalline substrates

Ballato, A.

doi:10.1109/ultsym.2005.1603302

Cited by 4 publications

(1 citation statement)

References 18 publications

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“…However, a shear wave FBAR has the advantage over a longitudinal FBAR for sensors, especially biochemical sensors which operate in a liquid medium, as the shear wave FBAR has substantial low acoustic leakage. FBARs can also be fabricated as a multilayered structure to achieve an expanded range of functions and improve overall performance [9][10]. Recently, a C-axis inclined Zig-zag ZnO multilayer transducer was fabricated to realize the simultaneous excitation of both quasi-longitudinal and quasi-shear modes at the VHF range [11].…”

Section: Introductionmentioning

confidence: 99%

Analysis of Thickness Vibrations of C-Axis Inclined Zig-Zag Multi-layered Zinc Oxide Thin Film Resonators

Zhang

2013

Ferroelectrics

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The free vibrations of a multilayer C-axis inclined zig-zag ZnO thin-film bulk acoustic wave resonator (FBAR) connected to external impedance have been analyzed; the frequency equation and mode shape for this resonator were derived based on the linear piezoelectric theory. The impedance characteristics of the FBAR are derived and compared with previous experimental results. The analytical result shows that as the layer number increases, the thickness shear mode remains stable while the longitudinal mode has shifted to a lower value. Sensitivity analysis has been performed to explain the discrepancy between our analytical result and previous experiment result. The analytical results provide an insight for the multi-layered zig-zag FBAR design and applications.

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Section: Introductionmentioning

confidence: 99%

Analysis of Thickness Vibrations of C-Axis Inclined Zig-Zag Multi-layered Zinc Oxide Thin Film Resonators

Zhang

2013

Ferroelectrics

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Compound Resonators and Microweighing Sensors

Ballato

2006

2006 IEEE International Frequency Control Symposium and Exposition

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MEMS fluid viscosity sensor

Ballato

2010

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Quartz shear resonators are employed widely as sensors to measure Newtonian viscosities of liquids. Perturbation of the electrical equivalent circuit parameters of the plate resonator by the fluid loading permits calculation of the mass density-shear viscosity product. Use of doubly rotated resonators does permit additional information to be obtained, but in no case can the viscosity and mass density values be separated. In these measurements, the resonator surface is exposed to a measurand bath whose extent greatly exceeds the penetration depth of the evanescent shear mode excited by the active element. Here we briefly review past techniques and current art, and sketch a proposal involving the interesting situation in which the separation between the resonator and a confining wall is less than the penetration depth of the fluid occupying the intervening region. To highlight the salient features of this novel case, the discussion is limited to the very idealized circumstance of a strictly 1-D problem, unencumbered by the vicissitudes inevitably encountered in practice. An appendix mentions some of these functional impedimenta and indicates how deviations from ideality might be approached in engineering embodiments. When the fluid confinement is of the order of the penetration depth, the resonator perturbation becomes a sensitive function of the separation, and it is found that viscosity and density may be separately and uniquely determined. Moreover, extreme miniaturization is a natural consequence because the penetration depth generally is on the order of micrometers for frequencies around 1 MHz at temperatures and pressures ordinarily encountered with gases and liquids. Micro-electro-mechanical (MEMS) versions of viscometers and associated types of fluid sensors are thereby enabled.

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Thin-film composite resonators on crystalline substrates

Cited by 4 publications

References 18 publications

Analysis of Thickness Vibrations of C-Axis Inclined Zig-Zag Multi-layered Zinc Oxide Thin Film Resonators

Analysis of Thickness Vibrations of C-Axis Inclined Zig-Zag Multi-layered Zinc Oxide Thin Film Resonators

Compound Resonators and Microweighing Sensors

MEMS fluid viscosity sensor

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