Thin film characterization by acoustic emission monitoring of nanoindentation

Daugela, Antanas; Wyrobek, Jerzy T.

doi:10.1109/intmag.2000.872356

Cited by 1 publication

(7 citation statements)

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“…In low load applications using various indenter shapes, AE based nanoindentation has mostly been used to study dislocation, slip, twinning and cracks in crystals [97][98]110,[115][116][117][118] and deformation, delamination and cracks in thin solid films. 96,98,110,141,[146][147][148] It is anticipated that the threshold at which AE appears during indentation can be used to evaluate the microstructural features of crystalline materials and thin solid films using nanoindentation technique. These investigations indicate that there is further scope of studying material deformation mechanisms on the basis of AE assisted indentation method.…”

Section: Ae and Materials Accommodation Mechanismmentioning

confidence: 99%

“…Hertzian spherical, Vickers, conical, Berkovich, cube-corner, Knoop, Rockwell C and flat plate circular cylinder; Tables 2-7). However, the list also included those few studies where indenter shapes were not mentioned, 97,98,146 but referred as nanoindenter. Recent advancement in calibration and standardisation of indenters has made it possible to use various indenter shapes in low load (e.g.…”

Section: Indenters and Specimensmentioning

confidence: 99%

“…Unlike the AE monitoring of bulk ceramics and metals, the cracking mechanism in overlay coatings is dependent on the adhesive nature as well as microstructures of thin layer and substrate. AE response during indentation of thin films has indicated that it is dominated by the 'high intensity AE peaks' due to a number of failure modes such as film cracking 96,110,[141][142][143][144][145][146][147][148][149][150][151] and delamination 98,110,143,149,[152][153][154] with some evidence of AE associated with plastic deformation. 141,147 Research has focused on thin films deposited using techniques such as physical vapour deposition (PVD), 110,141,144,151 chemical vapour deposition (CVD), 143,145,147 microwave plasma chemical vapour deposition (MPCVD) 149,150,153,154 or plasma assisted chemical vapour deposition (PACVD), 142 and other process such as sputtering 152 or pulsed laser deposition.…”

Section: Ae Monitoring Of Thin Solid Filmsmentioning

confidence: 99%

“…Nanoindentation is an ideal tool for measurement of mechanical properties of thin solid films 57,60,61 and there are some investigations which suggest that film failure behaviour and toughness under low loads can be characterised using AE. 96,98,146,147 For example, Jungk et al 96 studied the fracture behaviour and toughness of tetrahedral amorphous carbon films deposited on Si substrates. They suggested that 'pop-in' displacement excursion events during loading can be attributed to film cracking which were then associated with AE energy (Fig.…”

Section: Nanoindentersmentioning

confidence: 99%

“…Unlike bulk metals and ceramics where AE activity is generally associated with microstructural features, thin solid films present a complex AE waveform which is influenced by not only the microstructural features of the coating and substrate materials but also the adhesive strength of the film. 96,110,[141][142][143][144][145][146][147][148][149][150][151] Despite these complexities, AE monitoring of thin solid films has received wide research interest as the films are (1) generally hard and hence exhibit AE activity due to cracking and (2) indentation above a critical load generally initiates further cracking and AE activity due to film debonding. Investigations in this area generally tend to have a unique AE feature of pop-in or burst events which tend to correlate with large indenter displacement in the force indentation curve (Figs.…”

Section: Summary Of Conclusion: Thin Solid Filmsmentioning

confidence: 99%

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Indentation testing and its acoustic emission response: applications and emerging trends

Faisal

Ahmed

Reuben

2011

International Materials Reviews

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This review summarises the state of knowledge on acoustic emission (AE) techniques applied to material property evaluation during indentation (e.g. hardness) testing. There are two aspects of application of AE technique to indentation which makes it unique, i.e. (1) enhancing the understanding of the evolution of material accommodation mechanisms under loading and (2) qualitative and quantitative evaluation of mechanical properties such as fracture toughness and bond strength from the AE signal. Both of these aspects have the potential to improve our understanding of the structure property relationships of current and future generation materials. In addition, the knowledge developed here can be incorporated to improve the AE based condition monitoring systems for stress critical applications. This review concentrates on the phenomena which occur during indentation and how its examination can be used to study more fundamental behaviour of materials such as deformation and fracture. The uncertainty in quantifying and measuring the total crack surface in indentation makes a simple fracture mechanics based assessment of toughness difficult. It is therefore expected that correlation between AE and fracture patterns will lead to an improved method for material's quality evaluation. The main part of this review is presented on AE of material classifications. These classifications include ceramics, glasses, composites, metals and metallic foams, thin solid films and thermally sprayed coatings. Apart from quasi-static indentation testing, attention has also been paid to studies on various AE instrumented indentation systems so that information can be derived about the progress of deformation and cracking processes. This review discusses the studies summarising those aspects that have so far been established and the areas of controversy and/or lack of knowledge. The prospect of using AE techniques to monitor indentation tests is also assessed, taking into account those few studies that have been reported so far in different groups of materials. Although with some limitations, it is concluded that AE monitored indentation testing has considerable scope to assess in much more detail the deformation and cracking properties of materials under localised stress condition. It is possible to construct empirical relationships and develop theoretical understanding linking mechanical parameters with AE signal characteristics and its derived features. However, the occurrence of multiple events at different locations superimposing the AE signal requires more advanced signal processing techniques. With the advancement of very thin films and nanomaterials, it is anticipated that AE response measured during nanoindentation will be critical for enhancing our understanding of future generation applications, as it allows individual events to be investigated without resorting to more complex signal processing techniques. In terms of material accommodation, the understanding of physical mechanisms generating AE require a multiscale approach, e...

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